XacTorr® Series

XacTorr® Series Capacitance Manometers

Minimize drift and thermal effects. Maximize vacuum process results.

Models CMX0 / CMX1 / CMX2 / CMX3

Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.

The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate. This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance.

The result: ultra-accurate, repeatable and efficient vacuum measurement that ensures each time you evacuate a chamber, it reaches the precise Torr your process requires for clean, contaminant-free production.

Description

Features
  • Available for process ranges from 0.10 Torr to 1000 Torr
  • Multiple accuracy levels available
  • Patented Mark IV sensor
  • Digital architecture enables operation over a wide dynamic range with extremely good accuracy
  • Dual-zone temperature control improves measurement stability and repeatability
  • Multi-decade digital calibration provides superior window of known accuracy
  • Intelli-touch zero adjustment
  • Independent & easily accessible diagnostic service port
  • DeviceNet® and analog communication options
Benefits
  • Lower drift, superior protection from deposition of process gases
  • Elimination of manual potentiometers and drift associated with electronics
  • Fast warm-up, close temperature control, rapid response to changes
  • Multi-decade calibration provides superior window of known accuracy, real-time compensation of ambient temperature effects
  • Cannot be zeroed if pressure is too high or desired temperature not reached
  • Diagnostic port allows monitoring and data acquisition simultaneously with device operation for chamber and tool matching along with “real time” advanced troubleshooting
Applications
  • Semiconductor fabrication
  • Thin-film deposition processes – glass, web and optical coatings
  • Freeze drying perishable materials
  • High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)
Specifications

Product Type

Capacitance Manometer

Differentiator

Heated or Unheated
Analog or Digital

Performance

Temperature

CMX0 Ambient
CMX1 45°C
CMX2 100°C
CMX3 160°C

Pressure Range

0.1, 1, 2, 10, 20, 100, 1000 Torr
mBar & Pascal References Available

Accuracy

CMX0: 0.25% of Reading
CMX1, CMX2: 1 to 1000 Torr Ranges = 0.15% of Reading
CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading

Measurement Range

4 Decades

Temperature Effect

On Zero
0.002% FS / °C

On Span
0.02% FS / °C

Mechanical

Exposed Materials

Inconel® and/or AISI 316L Stainless Steel

Over Pressure Limit

17 psia or 125% of Full Scale, whichever is greater

EMC

Fully CE Certified to EMC Directive 89/336/EEC

Certifications/Approvals

Power Supply / Consumption

CMX0 power required is 200 mA @ ±15 Vdc

Power Input at Initial Warm-up Analog Models, Typical Values1: CMX1 – 270 [email protected]±15 Vdc (±5%); CMX2 – 620 mA @ ± 15 Vdc (±5%)

Power Input at Steady State Analog Models, Typical Values1:CMX1 – 175 mA @ ±15 Vdc (±5%); CMX2 – 350 mA @ ± 15 Vdc (±5%)

Power Input at Initial Warm-up DeviceNet Models, Typical Values: CMX1 – 400 mA @ 24 Vdc; CMX2 – 900 mA @ 24 Vdc

Power Input at Steady State DeviceNet Models, Typical Values: CMX1 – 300 mA @ 24 Vdc CMX2 – 600 mA @ 24 Vdc

1.15-Pin Male Sub D Model requires an additional 40 mA to power the internal relays (if energized).

Electrical Connection

Analog/RS485 via 9-Pin or 15-Pin “D” connector
DeviceNet™ via 5-Pin “M12” connector
Various cable adaptors available. See product data sheet for more information.

Digital Communication

DeviceNet™
RS485

Analog Communication

0-10 Vdc 5k Ohm load

Electrical

Size

Large

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