GF80 Series

GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters

Raises the standard in performance for value-driven metal sealed applications.

Models GF80

For many industrial and semiconductor processes, both performance and cost efficiency are crucial. The GF80 Series metal sealed mass flow controllers and meters deliver both: Engineered using the same fast response sensor and patented 4th generation MultiFlo™ technology as our best-selling GF100 series, it’s the right choice for operations that need high performance at a value price point. Moving to a metal sealed MFC brings the full benefit of MultiFloTM multi-gas/multi-range capability since there are no limitations in gases that can be used, enhanced purity of the gas due to elimination of oxygen permeation through elastomers, and a reduction in maintenance since metal seals will last indefinitely.

Description

Features
  • Long-term zero stability of <±0.5% full scale per year
  • <1 second settling times
  • Full-scale flow rates up to 300 slpm
  • All-metal seal flow path – 16µ inch Ra surface finish
  • Corrosion-resistant Hastelloy® sensor can operate at lower temperatures for gases prone to thermal decomposition
  • Programmable MultiFloTM capability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
  • Best-in-class temperature coefficient specification through active temperature compensation
  • Embedded self-test routines and independent diagnostic/service port
  • Slimline body with VCR fittings
  • DeviceNetTM, Profibus®, RS-485 and analog interfaces
Benefits
  • Fast <1 second flow settling time eliminates wasted gas and process variability
  • No elastomer seals that can have oxygen permeation, requiring replacement over time
  • MultiFloTM simplifies and streamlines changing process gases — no more removing and calibrating MFCs
  • New gases and/or ranges can be set in under 60 seconds
  • Measurement accuracy not affected by temperature variations
  • Convenient access to diagnostics port for maximum uptime
  • Compact size eases integration into tight machine spaces; excellent choice for retrofits
  • Multi-protocol communication interface simplifies integration into existing systems
Key Applications
  • Cost efficient retrofit/upgrade of legacy MFCs in refurbished semiconductor process tools
  • Reduce MFC inventory in six-inch/eight-inch semiconductor fabs
  • MOCVD for LED and power device manufacturing
  • Solar/thin film chemical vapor deposition (CVD) systems
  • Analytical OEM equipment
Specifications

Product Type

Mass Flow Controller

Differentiator

High Purity

Performance

Flow Range (Full Scale Capacity)

3 sccm – 300 slm

Accuracy

±1% S.P. 35-100%
±0.35% F.S. < 5-35%

Repeatability

< ±0.2% S.P.

Linearity

±0.5% F.S. (included in accuracy)

Response Time

Normally Closed Valve: <1 sec

Multi-Gas & Range Configurability

MultiFlo™ Available

Pressure Transient Insensitivity

Control Range

< 5% – 100%

Number of Bins

Standard GF Series: 11 bins
High Flow GF Series: 4 bins

Valve Shut Down

Standard GF Series: < 1% F.S.

High Flow GF Series: < 4% of Standard Configuration F.S. @ 30psig/atm out N2 equiv.

Zero Stability

< ±0.5% F.S. per year

Mechanical

Seal Material

Metal

Wetted Materials

316 Stainless Steel
Hastelloy C-22
17-7 PH
430SS
KM-45

Valve Options

Normally Closed
Meter (no valve)

Ratings

Max Temperature

50oC

Differential Pressure Range

3-860 sccm = 7-45 psid
861-7200 sccm = 15-45 psid
7201-50000 sccm = 25-45 psid
51-300 slm = 30-90 psid
(typical pressure drops

Max Pressure

Standard GF Series: 150 psig (10 bar)
High Flow GF Series: Meter = 75 psig (5 bar), Controller = 150 psig (10 bar)

Leak Integrity

1×10-10 atm cc/sec He

Diagnostics & Display

Diagnostic Capability

Available

Status Lights

MFC Health, Network Status

Alarms

Control Valve Output, Network Interruption

Diagnostic / Service Port

RS485 via 2.5mm jack (all models)

Electrical

Analog Communication

0-20 mA
4-20 mA
0-5 Vdc
0-10 Vdc

Digital Communication

DeviceNet™
Profibus®
RS485 S-Protocol
RS485 L-Protocol
RS485 A-Protocol (GF081)

Electrical Connection

Profibus/Analog via 9-Pin “D” connector
RS485/Analog via 9-Pin”D” connector, 15-Pin “D” connector
DeviceNet™ via 5-Pin “M12” connector

Power Supply / Consumption

Standard GF Series:   RS485 from +12 Vdc to +24 Vdc = 7 Watts max

Profibus from +13.5 Vdc to +27 Vdc = 7 Watts max

DeviceNet™ from +11 Vdc to +25 Vdc = 13.6 Watts max

High Flow GF Series: RS485 from +12 Vdc to +24 Vdc = 3.3 Watts max

Profibus from +13.5 Vdc to +27 Vdc = 3.3 Watts max

DeviceNet™ from +11 Vdc to +25 Vdc = 3.3 Watts max

Environmental Compliance

Safety EN61010-1
RoHS

EMC

CE: EN6126: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Compliance

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