GF100 Series

GF100 Series Metal Sealed Thermal Mass Flow Controllers & Meters

High purity flow path. Outstanding performance, reliability, and repeatability.

Models GF100 / GF101 / GF120 / GF120XSL / GF120XSD / GF121

Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.

The result: increased process flexibility and efficiency combined with the industry’s highest levels of process gas purity to help maximize yields and productivity.

Description

Features
  • Long-term zero stability of <±0.5% full scale per year
  • Settling times: 700 ms – <1 second
  • Full-scale flow rates up to 300 slpm
  • All-metal seal flow path: option for 4µ or 10µ inch Ra surface finish
  • Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures
  • MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
  • Local display
  • Optional SDS gas delivery
  • DeviceNetTM, RS-485 L-Protocol and analog interfaces
Benefits
  • High-performance components marathon tested to seven times semiconductor industry standards for reliability
  • All metal, corrosion resistant flow path with reduced surface area and unswept volumes ensures faster dry-down during purge steps
  • With MultiFloTM, new process gases and/or ranges can be set in under 60 seconds – no more removing and calibrating MFCs
  • Highly configurable platform enables drop-in replacement and upgrade of most brands of metal sealed MFCs, including the former Celerity, Mykrolis, Tylan and UNIT brands
  • GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes
  • Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
Key Applications
  • Semiconductor etch tools
  • Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
  • Physical vapor deposition (PVD) systems
  • Epitaxial process systems
Specifications

Product Type

Mass Flow Controller

Differentiator

High Purity/Ultra-High Purity
Standard GF Series
High Flow GF Series

Performance

Flow Range (Full Scale Capacity)

Standard GF Series: 3 sccm – 55 slm
High Flow GF Series: 55 slm – 300 slm

Accuracy

±1% S.P. > 35-100%
±0.35% F.S. 2-35%

Repeatability

< ±0.15% S.P.

Linearity

±0.5% F.S. (included in accuracy)

Response Time

Normally Closed Valve: 700 ms – < 1 sec
SDS Gas Delivery: < 3 sec

Response Time

Normally Open Valve: <1.5 sec (specific models)

Multi-Gas & Range Configurability

MultiFlo™ Standard (most models)

Pressure Transient Insensitivity

Control Range

Standard GF Series: < 3-100%
High Flow GF Series: 5-100%

Number of Bins

Standard GF Series: 11 bins
High-Flow GF Series: 4 bins

Valve Shut Down

Standard GF Series: < 1% F.S.
High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out

Zero Stability

< ±0.5% F.S. per year

Flow Temperature Coefficient

Span: 0.05% S.P. per °C
Zero: 0.005% F.S. per °C

Mechanical

Seal Material

Metal

Level of Purity / Surface Finish

4 – 10µ inch Ra

Wetted Materials

SEMI F20 HP/UHP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel
KM-45

Valve Options

Normally Closed
Normally Open (specific models only)
Meter (no valve)

Ratings

Max Temperature

50oC

Differential Pressure Range

3-860 sccm = 7-45 psid
861-7200 sccm = 10-45 psid
7201-55000 sccm = 15-45 psid
51 slm-300 slm = 30-90 psid
*Typical pressure drops. Contact Brooks Technical Support for more information.

Max Pressure

Standard GF Series: 500 psia max
High Flow GF Series: 75 psig (controller), 150 psig (meter)

Leak Integrity

1×10-10 atm cc/sec He

Diagnostics & Display

Diagnostic Capability

Available

Status Lights

MFC Health
Network Status

Alarms

Control Valve Output
Network Interruption

Diagnostic / Service Port

RS-485 via 2.5mm jack (all models)

Display

Top Mount Integrated LCD
Viewing Angle: Fixed
Viewing Distance: 10 feet
Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)
Resolution: 0.1 (unit)

Electrical

Analog Communication

0-5 Vdc

Digital Communication

DeviceNet™
RS485 L-Protocol

Electrical Connection

Analog/RS485 via 9-Pin “D” connector
DeviceNet™ via 5-Pin “M12” connector
Various cable adaptors available. See product data sheet for more information.

Power Supply / Consumption

Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)
DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc
(Under typical operating conditions)

Compliance

EMC

EC Directive 2004/108/EC
CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Environmental Compliance

RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006

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