GF100 Series EtherCAT

The Fastest and Most Accurate MFCs

Enhanced with the Speed of EtherCAT®

Models GF100 / GF101 / GF120 / GF120XSD / GF120XSL / GF121 / GF125 / GF126

Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to bring PTI mass flow control technology to market, GF125 minimizes process gas flow variation due to pressure and temperature fluctuations. Standard MultiFlo™ technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.

The result: reduced size and cost of gas panels, by eliminating the need for point of use pressure regulators, pressure transducers, and associated hardware, combined with the industry’s best PTI performance to maximize yields and productivity.

Description

Performance Perfected for Semiconductor Processes
  • Embedded diagnostics leverage real-time EtherCAT® data acquisition capabilities
  • Ultra-stable flow sensor (≤ 0.15% of S.P. drift per year) enables tighter low set point accuracy and reduces maintenance requirements
  • Improved valve shutdown (≤ 0.15% of bin range) reduces valve leak-by to reduce first wafer effects
  • Newly enhanced pressure transient insensitivity reduces crosstalk sensitivity for consistent mass flow delivery
Features
  • Long-term zero stability of <±0.15% full scale per year
  • Settling times: 300 ms – <1 second
  • Full-scale flow rates up to 300 slpm
  • All-metal seal flow path: option for 5µ or 10µ inch Ra surface finish
  • Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures
  • MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
  • Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
  • GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes
Benefits

Exceptional performance

  • Rapid reaction times improve application efficiency
  • Flexible topology
    • Virtually limitless network topology possible
  • Simple and robust
    • Configuration, diagnostics, and maintenance
  • Affordability
    • Standard Ethernet port
Key Applications
  • Semiconductor etch tools
  • Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
  • Physical vapor deposition (PVD) systems
  • Epitaxial process systems
Specifications

Product Type

Mass Flow Controller

Differentiator

EtherCAT Communication
High Purity/Ultra-High Purity
Embedded Diagnostics
Ultra-stable Flow Sensor
Improved Valve Shutdown

Level of Purity / Surface Finish

5 – 10µ inch Ra

Seal Material

Metal

Mechanical

Flow Temperature Coefficient

Span: 0.05% S.P. per °C
Zero: 0.005% F.S. per °C

Zero Stability

< ±0.15% F.S. per year

Valve Shut Down

Standard GF Series: < 0.15% F.S.
High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out

Number of Bins

Standard GF Series: 11 bins
High-Flow GF Series: 4 bins

Control Range

Standard GF Series: 2-100%
High Flow GF Series: 5-100%

Multi-Gas & Range Configurability

MultiFlo™ Standard (most models)

Pressure Transient Insensitivity

Specific models

Response Time

Normally Open Valve: <1.5 sec (specific models)

Response Time

Normally Closed Valve: 300 ms – < 1 sec
SDS Gas Delivery: < 3 sec

Repeatability

< ±0.15% S.P.

Accuracy

Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20%
High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35%

Flow Range (Full Scale Capacity)

Standard GF Series: 3 sccm – 55 slm
High Flow GF Series: 55 slm – 300 slm

Performance

Wetted Materials

SEMI F20 HP/UHP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel
KM-45

Valve Options

Normally Closed
Normally Open (specific models only)
Meter (no valve)

Ratings

Max Temperature

50oC

Differential Pressure Range

3-860 sccm = 7-45 psid
861-7200 sccm = 10-45 psid
7201-55000 sccm = 15-45 psid
51 slm-300 slm = 30-90 psid
SDS Models 10 Torr- 30 psid typical
*Typical pressure drops. Contact Brooks Technical Support for more information.

Max Pressure

Standard GF Series: up to 500 psia max
High Flow GF Series: 75 psig (controller), 150 psig (meter)

Leak Integrity

1×10-10 atm cc/sec He

Diagnostics & Display

Diagnostic Capability

Available

Status Lights

Run
Error
Power
Network Status

Alarms

Control Valve Output
Network Interruption
Temperature High/Low
Pressure High/Low
Power Surge/Sag

Power Supply / Consumption

24 Vdc, 7 Watts
(Under typical operating conditions)

Electrical Connection

Power via 5-pin M8 Connector, EtherCAT via twin RJ45

Digital Communication

EtherCAT®

Analog Communication

Electrical

Display

Top Mount Integrated LCD
Viewing Angle: Fixed
Viewing Distance: 10 feet
Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)
Resolution: 0.1 (unit)

Diagnostic / Service Port

Micro USB

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