GF100 Series EtherCAT

The Fastest and Most Accurate MFCs

Enhanced with the Speed of EtherCAT®

Models GF100 / GF101 / GF120 / GF120XSD / GF120XSL / GF121 / GF125 / GF126

Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to bring PTI mass flow control technology to market, GF125 minimizes process gas flow variation due to pressure and temperature fluctuations. Standard MultiFlo™ technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.

The result: reduced size and cost of gas panels, by eliminating the need for point of use pressure regulators, pressure transducers, and associated hardware, combined with the industry’s best PTI performance to maximize yields and productivity.

Key Applications

Semiconductor etch tools
Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
Physical vapor deposition (PVD) systems
Epitaxial process systems

Performance Perfected for Semiconductor Processes

Embedded diagnostics leverage real-time EtherCAT® data acquisition capabilities
Ultra-stable flow sensor (≤ 0.15% of S.P. drift per year) enables tighter low set point accuracy and reduces maintenance requirements
Improved valve shutdown (≤ 0.15% of bin range) reduces valve leak-by to reduce first wafer effects
Newly enhanced pressure transient insensitivity reduces crosstalk sensitivity for consistent mass flow delivery

Features

Long-term zero stability of <±0.15% full scale per year
Settling times: 300 ms – <1 second
Full-scale flow rates up to 300 slpm
All-metal seal flow path: option for 5µ or 10µ inch Ra surface finish
Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures
MultiFlo^TM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes

Benefits

Exceptional performance

Rapid reaction times improve application efficiency

Flexible topology
- Virtually limitless network topology possible
Simple and robust
- Configuration, diagnostics, and maintenance
Affordability
- Standard Ethernet port

Specifications

Mechanical Performance Ratings Diagnostics & Display Electrical

Product Type	Mass Flow Controller
Differentiator	EtherCAT Communication High Purity/Ultra-High Purity Embedded Diagnostics Ultra-stable Flow Sensor Improved Valve Shutdown
Level of Purity / Surface Finish	5 – 10µ inch Ra
Seal Material	Metal
Flow Temperature Coefficient	Span: 0.05% S.P. per °C Zero: 0.005% F.S. per °C
Zero Stability	< ±0.15% F.S. per year
Valve Shut Down	Standard GF Series: < 0.15% F.S. High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out
Number of Bins	Standard GF Series: 11 bins High-Flow GF Series: 4 bins
Control Range	Standard GF Series: 2-100% High Flow GF Series: 5-100%
Multi-Gas & Range Configurability	MultiFlo™ Standard (most models)
Pressure Transient Insensitivity	Specific models
Response Time	Normally Open Valve: <1.5 sec (specific models)
Response Time	Normally Closed Valve: 300 ms – < 1 sec SDS Gas Delivery: < 3 sec
Repeatability	< ±0.15% S.P.
Accuracy	Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20% High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35%
Flow Range (Full Scale Capacity)	Standard GF Series: 3 sccm – 55 slm High Flow GF Series: 55 slm – 300 slm
Wetted Materials	SEMI F20 HP/UHP Compliant 316L VIM/VAR Hastelloy C-22 316L Stainless Steel 304 Stainless Steel KM-45
Valve Options	Normally Closed Normally Open (specific models only) Meter (no valve)
Max Temperature	50^oC
Differential Pressure Range	3-860 sccm = 7-45 psid 861-7200 sccm = 10-45 psid 7201-55000 sccm = 15-45 psid 51 slm-300 slm = 30-90 psid SDS Models 10 Torr- 30 psid typical *Typical pressure drops. Contact Brooks Technical Support for more information.
Max Pressure	Standard GF Series: up to 500 psia max High Flow GF Series: 75 psig (controller), 150 psig (meter)
Leak Integrity	1×10^-10 atm cc/sec He
Diagnostic Capability	Available
Status Lights	Run Error Power Network Status
Alarms	Control Valve Output Network Interruption Temperature High/Low Pressure High/Low Power Surge/Sag
Power Supply / Consumption	24 Vdc, 7 Watts (Under typical operating conditions)
Electrical Connection	Power via 5-pin M8 Connector, EtherCAT via twin RJ45
Digital Communication	EtherCAT®
Analog Communication	—
Display	Top Mount Integrated LCD Viewing Angle: Fixed Viewing Distance: 10 feet Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa) Resolution: 0.1 (unit)
Diagnostic / Service Port	Micro USB

BCN (+34) 93 864 68 43

MAD (+34) 91 864 6843

Unit converter