CMC Series

CMC Series Capacitance Manometers

Compact, proven unheated gauges for cost-effective vacuum measurement.

Models CMC

CMC Series capacitance manometers from Brooks Instrument deliver reliable, accurate vacuum measurement over a wide range of operating temperatures, providing an economical alternative to larger premium unheated gauges. Its compact design and proven performance make it an ideal upgrade for existing tools needing a small form-factor gauge.

Reliable and repeatable operation is assured in even the most aggressive processes through the all-welded design and Iconel® wetted surfaces. The combination of precision components and a wide temperature compensated operating range lets Brooks deliver best-in-class zero and span temperature coefficients for optimum measurement stability.


  • Available for process ranges from 10 Torr to 1000 Torr
  • Two accuracy levels available: 0.25% or 0.50% of reading (optional)
  • Exceptional performance over a wide range of operating temperatures
  • 40% smaller than traditional unheated capacitance manometers
  • All-welded construction and Inconel® wetted surfaces
  • Optional high accuracy calibration matches the accuracy of more costly premium unheated manometers
  • Best-in-class zero and span temperature coefficients
  • Space-saving design helps fit device into tight machine spaces
  • Optimum measurement repeatability compared to other designs that are prone to error inducing internal stresses
  • Semiconductor fabrication
  • Thin-film deposition processes – glass, web and optical coatings
  • Freeze drying perishable materials
  • High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)

Product Type

Capacitance Manometer






Pressure Range

10, 20, 50, 100, 500 and 1000 Torr Full Scale


Type A = 0.25% of Reading
Type B = 0.50% of Reading

Measurement Range

4 Decades

Temperature Effect

On Zero
0.002% FS / °C

On Span
0.027% FS / °C


Exposed Materials


Over Pressure Limit

45 psia




Analog Communication

0-10 Vdc (<10k Ohm load)

Digital Communication

Environmental Compliance

RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006


Directive 89/336/EEC


Power Supply / Consumption

< 200 mW

Electrical Connection

15-Pin DSub on 6” cable
9-Pin DSub
5-Pin terminal strip

You may also like…

    Solicitar información

    Estoy de acuerdo y he leído el aviso legal.

    En cumplimiento de la LOPD 15/1999 de 13 de Diciembre, le informamos que sus datos podrían pasar a formar parte de un fichero propiedad de la empresa Gometrics S.L. Usted tiene derecho de acceso, rectificación, oposición y cancelación que puede ejercer mediante escrito a la dirección anteriormente indicada. Por la presente autoriza expresamente a la compañía a que le remita información sobre sus servicios a la dirección de correo electrónico indicada en el formulario. La información ofrecida en esta página web es meramente orientativa y no es, en ningún caso, vinculante.