CMC Series

CMC Series Capacitance Manometers

Compact, proven unheated gauges for cost-effective vacuum measurement.

Models CMC

CMC Series capacitance manometers from Brooks Instrument deliver reliable, accurate vacuum measurement over a wide range of operating temperatures, providing an economical alternative to larger premium unheated gauges. Its compact design and proven performance make it an ideal upgrade for existing tools needing a small form-factor gauge.

Reliable and repeatable operation is assured in even the most aggressive processes through the all-welded design and Iconel® wetted surfaces. The combination of precision components and a wide temperature compensated operating range lets Brooks deliver best-in-class zero and span temperature coefficients for optimum measurement stability.

Features

Available for process ranges from 10 Torr to 1000 Torr
Two accuracy levels available: 0.25% or 0.50% of reading (optional)
Exceptional performance over a wide range of operating temperatures
40% smaller than traditional unheated capacitance manometers
All-welded construction and Inconel® wetted surfaces

Benefits

Optional high accuracy calibration matches the accuracy of more costly premium unheated manometers
Best-in-class zero and span temperature coefficients
Space-saving design helps fit device into tight machine spaces
Optimum measurement repeatability compared to other designs that are prone to error inducing internal stresses

Applications

Semiconductor fabrication
Thin-film deposition processes – glass, web and optical coatings
Freeze drying perishable materials
High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)

Specifications

Performance Mechanical Electrical Certifications / Approvals

Product Type	Capacitance Manometer
Differentiator	Unheated
Temperature	Ambient
Pressure Range	10, 20, 50, 100, 500 and 1000 Torr Full Scale
Accuracy	Type A = 0.25% of Reading Type B = 0.50% of Reading
Measurement Range	4 Decades
Temperature Effect	On Zero 0.002% FS / °COn Span 0.027% FS / °C
Exposed Materials	Inconel
Over Pressure Limit	45 psia
Size	Compact
Analog Communication	0-10 Vdc (<10k Ohm load)
Digital Communication	—
Environmental Compliance	RoHS Directive (2011/65/EU) REACH Directive EC 1907/2006
EMC	CE Directive 89/336/EEC
Power Supply / Consumption	< 200 mW
Electrical Connection	15-Pin DSub on 6” cable 9-Pin DSub 5-Pin terminal strip

BCN (+34) 93 864 68 43

MAD (+34) 91 864 6843

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