CMC Series

CMC Series Capacitance Manometers

Compact, proven unheated gauges for cost-effective vacuum measurement.

Models CMC

CMC Series capacitance manometers from Brooks Instrument deliver reliable, accurate vacuum measurement over a wide range of operating temperatures, providing an economical alternative to larger premium unheated gauges. Its compact design and proven performance make it an ideal upgrade for existing tools needing a small form-factor gauge.

Reliable and repeatable operation is assured in even the most aggressive processes through the all-welded design and Iconel® wetted surfaces. The combination of precision components and a wide temperature compensated operating range lets Brooks deliver best-in-class zero and span temperature coefficients for optimum measurement stability.

Description

Features
  • Available for process ranges from 10 Torr to 1000 Torr
  • Two accuracy levels available: 0.25% or 0.50% of reading (optional)
  • Exceptional performance over a wide range of operating temperatures
  • 40% smaller than traditional unheated capacitance manometers
  • All-welded construction and Inconel® wetted surfaces
Benefits
  • Optional high accuracy calibration matches the accuracy of more costly premium unheated manometers
  • Best-in-class zero and span temperature coefficients
  • Space-saving design helps fit device into tight machine spaces
  • Optimum measurement repeatability compared to other designs that are prone to error inducing internal stresses
Applications
  • Semiconductor fabrication
  • Thin-film deposition processes – glass, web and optical coatings
  • Freeze drying perishable materials
  • High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)
Specifications

Product Type

Capacitance Manometer

Differentiator

Unheated

Performance

Temperature

Ambient

Pressure Range

10, 20, 50, 100, 500 and 1000 Torr Full Scale

Accuracy

Type A = 0.25% of Reading
Type B = 0.50% of Reading

Measurement Range

4 Decades

Temperature Effect

On Zero
0.002% FS / °C

On Span
0.027% FS / °C

Mechanical

Exposed Materials

Inconel

Over Pressure Limit

45 psia

Size

Compact

Electrical

Analog Communication

0-10 Vdc (<10k Ohm load)

Digital Communication

Environmental Compliance

RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006

EMC

CE
Directive 89/336/EEC

Certifications/Approvals

Power Supply / Consumption

< 200 mW

Electrical Connection

15-Pin DSub on 6” cable
9-Pin DSub
5-Pin terminal strip

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