GF100 Series

GF100 Series Metal Sealed Thermal Mass Flow Controllers & Meters

High purity flow path. Outstanding performance, reliability, and repeatability.

Models GF100 / GF101 / GF120 / GF120XSL / GF120XSD / GF121

Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.

The result: increased process flexibility and efficiency combined with the industry’s highest levels of process gas purity to help maximize yields and productivity.

Features

Long-term zero stability of <±0.5% full scale per year
Settling times: 700 ms – <1 second
Full-scale flow rates up to 300 slpm
All-metal seal flow path: option for 4µ or 10µ inch Ra surface finish
Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures
MultiFlo^TM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
Local display
Optional SDS gas delivery
DeviceNet^TM, RS-485 L-Protocol and analog interfaces

Benefits

High-performance components marathon tested to seven times semiconductor industry standards for reliability
All metal, corrosion resistant flow path with reduced surface area and unswept volumes ensures faster dry-down during purge steps
With MultiFlo^TM, new process gases and/or ranges can be set in under 60 seconds – no more removing and calibrating MFCs
Highly configurable platform enables drop-in replacement and upgrade of most brands of metal sealed MFCs, including the former Celerity, Mykrolis, Tylan and UNIT brands
GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes
Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting

Key Applications

Semiconductor etch tools
Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
Physical vapor deposition (PVD) systems
Epitaxial process systems

Specifications

Performance Mechanical Ratings Diagnostics & Display Electrical

Product Type	Mass Flow Controller
Differentiator	High Purity/Ultra-High Purity Standard GF Series High Flow GF Series
Flow Range (Full Scale Capacity)	Standard GF Series: 3 sccm – 55 slm High Flow GF Series: 55 slm – 300 slm
Accuracy	±1% S.P. > 35-100% ±0.35% F.S. 2-35%
Repeatability	< ±0.15% S.P.
Linearity	±0.5% F.S. (included in accuracy)
Response Time	Normally Closed Valve: 700 ms – < 1 sec SDS Gas Delivery: < 3 sec
Response Time	Normally Open Valve: <1.5 sec (specific models)
Multi-Gas & Range Configurability	MultiFlo™ Standard (most models)
Pressure Transient Insensitivity	—
Control Range	Standard GF Series: < 3-100% High Flow GF Series: 5-100%
Number of Bins	Standard GF Series: 11 bins High-Flow GF Series: 4 bins
Valve Shut Down	Standard GF Series: < 1% F.S. High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out
Zero Stability	< ±0.5% F.S. per year
Flow Temperature Coefficient	Span: 0.05% S.P. per °C Zero: 0.005% F.S. per °C
Seal Material	Metal
Level of Purity / Surface Finish	4 – 10µ inch Ra
Wetted Materials	SEMI F20 HP/UHP Compliant 316L VIM/VAR Hastelloy C-22 316L Stainless Steel 304 Stainless Steel KM-45
Valve Options	Normally Closed Normally Open (specific models only) Meter (no valve)
Max Temperature	50^oC
Differential Pressure Range	3-860 sccm = 7-45 psid 861-7200 sccm = 10-45 psid 7201-55000 sccm = 15-45 psid 51 slm-300 slm = 30-90 psid *Typical pressure drops. Contact Brooks Technical Support for more information.
Max Pressure	Standard GF Series: 500 psia max High Flow GF Series: 75 psig (controller), 150 psig (meter)
Leak Integrity	1×10^-10 atm cc/sec He
Diagnostic Capability	Available
Status Lights	MFC Health Network Status
Alarms	Control Valve Output Network Interruption
Diagnostic / Service Port	RS-485 via 2.5mm jack (all models)
Display	Top Mount Integrated LCD Viewing Angle: Fixed Viewing Distance: 10 feet Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa) Resolution: 0.1 (unit)
Analog Communication	0-5 Vdc
Digital Communication	DeviceNet™ RS485 L-Protocol
Electrical Connection	Analog/RS485 via 9-Pin “D” connector DeviceNet™ via 5-Pin “M12” connector Various cable adaptors available. See product data sheet for more information.
Power Supply / Consumption	Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%) DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc (Under typical operating conditions)
Compliance
EMC	EC Directive 2004/108/EC CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Environmental Compliance	RoHS Directive (2011/65/EU) REACH Directive EC 1907/2006

BCN (+34) 93 864 68 43

MAD (+34) 91 864 6843

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