5850EM Series

5850EM Series Metal Sealed Thermal Mass Flow Controllers

Proven long-term stability. Ultra-pure performance for high pressure applications.

Models 5850EM / 5851EM

5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E & i Series MFCs. Its metal sealed construction and electro-polished wetted surfaces ensure outstanding flow integrity and help improve overall process efficiency by eliminating the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

Description

Features
  • Long-term zero stability of <0.2% full scale per year
  • <3 seconds settling time to command changes with negligible overshoot/undershoot
  • Wide flow range – from 3 sccm up to 30,000 slpm
  • High pressure rating – up to 1,500 psi
  • Optional enhanced process internal finish – 5µ inch Ra avg
  • Removable flow sensor
  • Insensitive to mounting attitude
  • Mechanically and electrically compatible with other mass flow controllers
  • TTL compatible “valve off” and purge function
Benefits
  • All-metal flow path enhances gas purity and reduces leaks
  • Proven long-term stability and accuracy across broad process and application range
  • Excellent return on investment due to reliable performance
  • Removable flow sensor eliminates need for continuous monitoring and readjustment of gas pressures
  • Easily installed and serviced with analog only input/outputs
Key Applications
  • Fiber Optic
  • LED / MOCVD
  • Semiconductor
  • Solar
Specifications

Product Type

Mass Flow Controller

Differentiator

Large installed base with proven long term performance

Performance

Flow Range (Full Scale Capacity)

.06 sccm – 30,000 sccm

Accuracy

1% F.S. incl. linearity
1.5% F.S. incl. linearity >20 slpm

Repeatability

0.2% of rate

Linearity

±0.5% F.S. (included in accuracy)

Response Time

Normally Closed Valve: <3 sec
Optional: 600 msec

Multi-Gas & Range Configurability

Pressure Transient Insensitivity

Control Range

2-3% – 100%

Number of Bins

N/A

Valve Shut Down

N/A

Zero Stability

< ±0.5% F.S. per year

Mechanical

Seal Material

Metal

Level of Purity / Surface Finish

316L VAR, 316L, and high alloy ferritic stainless steel

Wetted Materials

Valve Seat: 316L, Viton® fluoroelastomers, Buna-N, Kalrez® or Teflon®

Valve Options

Normally Closed, Normally Open
Meter (no valve)

Ratings

Max Temperature

65oC

Differential Pressure Range

5 – 50 psi (gas and range dependent)

Max Pressure

1500 psi

Leak Integrity

1×10-10 atm cc/sec He

Diagnostics & Display

Diagnostic Capability

Status Lights

MFC Health, Network Status

Alarms

Control Valve Output, Network Interruption

Diagnostic / Service Port

N/A

Electrical

Analog Communication

4-20 mA
0-5 Vdc

Digital Communication

Electrical Connection

15 Pin D Connector (DA-15P)

Power Supply / Consumption

Normally Closed valve: 3.25 watts
Normally Open valve: 10.5 watts

Compliance

Environmental Compliance

N/A

EMC

(89/336/EEC) per 61326

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