5850EM Series

5850EM Series Metal Sealed Thermal Mass Flow Controllers

Proven long-term stability. Ultra-pure performance for high pressure applications.

Models 5850EM / 5851EM

5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E & i Series MFCs. Its metal sealed construction and electro-polished wetted surfaces ensure outstanding flow integrity and help improve overall process efficiency by eliminating the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

Features

Long-term zero stability of <0.2% full scale per year
<3 seconds settling time to command changes with negligible overshoot/undershoot
Wide flow range – from 3 sccm up to 30,000 slpm
High pressure rating – up to 1,500 psi
Optional enhanced process internal finish – 5µ inch Ra avg
Removable flow sensor
Insensitive to mounting attitude
Mechanically and electrically compatible with other mass flow controllers
TTL compatible “valve off” and purge function

Benefits

All-metal flow path enhances gas purity and reduces leaks
Proven long-term stability and accuracy across broad process and application range
Excellent return on investment due to reliable performance
Removable flow sensor eliminates need for continuous monitoring and readjustment of gas pressures
Easily installed and serviced with analog only input/outputs

Key Applications

Fiber Optic
LED / MOCVD
Semiconductor
Solar

Specifications

Performance Ratings Diagnostics & Display

Product Type	Mass Flow Controller
Differentiator	Large installed base with proven long term performance
Flow Range (Full Scale Capacity)	.06 sccm – 30,000 sccm
Accuracy	1% F.S. incl. linearity 1.5% F.S. incl. linearity >20 slpm
Repeatability	0.2% of rate
Linearity	±0.5% F.S. (included in accuracy)
Response Time	Normally Closed Valve: <3 sec Optional: 600 msec
Multi-Gas & Range Configurability	–
Pressure Transient Insensitivity	–
Control Range	2-3% – 100%
Number of Bins	N/A
Valve Shut Down	N/A
Zero Stability	< ±0.5% F.S. per year
Mechanical
Seal Material	Metal
Level of Purity / Surface Finish	316L VAR, 316L, and high alloy ferritic stainless steel
Wetted Materials	Valve Seat: 316L, Viton® fluoroelastomers, Buna-N, Kalrez® or Teflon®
Valve Options	Normally Closed, Normally Open Meter (no valve)
Max Temperature	65^oC
Differential Pressure Range	5 – 50 psi (gas and range dependent)
Max Pressure	1500 psi
Leak Integrity	1×10^-10 atm cc/sec He
Diagnostic Capability	–
Status Lights	MFC Health, Network Status
Alarms	Control Valve Output, Network Interruption
Diagnostic / Service Port	N/A
Electrical
Analog Communication	4-20 mA 0-5 Vdc
Digital Communication	–
Electrical Connection	15 Pin D Connector (DA-15P)
Power Supply / Consumption	Normally Closed valve: 3.25 watts Normally Open valve: 10.5 watts
Compliance
Environmental Compliance	N/A
EMC	(89/336/EEC) per 61326

BCN (+34) 93 864 68 43

MAD (+34) 91 864 6843

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