Showing all 38 results

Cartridge III Valve

For use as a replacement valve with Brooks® purge meters.

Models 947N

The Cartridge III Valve is a multipurpose valve, designed for use with Brooks® purge meters in gas and liquid flow applications. It is interchangeable with previous versions of Brooks valves.

These valves come in three different sizes – low, medium and high flow. The stem is conical tapered at the end and it has two orifice sizes that provide a wide choice of flow ranges for all models. A Teflon piece is crimped into the valve body which gives better setability, repeatability and feel of operation.

GF40 Series

GF40 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

One device. Multiple gases and flows. Maximum flexibility.

Models GF40

Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.

5700 Series

5700 Series Elastomer Sealed Mass Flow Meters

Cost-effective gas flow metering for targeted applications.

Models 5700

When you need a compact, economical mass flow meter that delivers long-term, stable flow measurement without requiring temperature or pressure correction, the 5700 Series thermal mass flow meter meets your requirements. It’s engineered specifically for the needs of purge gas, process analysis and analytical flow measurement: cost-effective and stable, with an electrical output signal that makes it ideal for replacing turbine meters, variable area flow meters and other volumetric devices.

4800 Series

4800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

Ultra-fast response for time-critical flow processes.

Models 4850 / 4860

The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can be. That’s the key advantage of the 4800 Series controllers and meters: An advanced MEMS-based thermal sensor, combined with a proprietary PID algorithm to optimize control valve response, makes it possible for select 4800 Series controllers to quickly match actual mass flow to any changes in set point. The optional Local Operator Interface (LOI) provides a convenient user interface to view, control, and configure the devices eliminating the need for remote secondary electronics.

5850E and i Series

5850E & i Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

Long-term device stability keeps your production on-target.

Models 5850E, i / 5860E, i / 5851E, i / 5861E, i / 5853E, i / 5863E, i

Every product line has a workhorse — our 5850E and 5850i Series thermal mass flow controllers fit the bill. Actively in use for decades in thousands of applications worldwide, they utilize a unique, extremely stable flow sensor to provide the reliable, accurate and repeatable measurement and control that today’s demanding industrial manufacturing processes require.

SLAMf Series

SLAMf Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

Precision mass flow control. Hardened for the harshest environments.

Models SLAMf50 / SLAMf60 / SLAMf51 / SLAMf61 / SLAMf53 / SLAMf63 / SLAMf64

Whether it’s dust, moisture, temperature extremes or wash-down requirements, the SLAMf Series elastomer sealed thermal mass flow controllers and meters deliver the precise accuracy and long-term stability of our proven SLA5800 family of meters and controllers. A specially engineered NEMA4X/IP66 enclosure protects our advanced digital electronics and ensures stable, accurate measurement and control of your process-critical gas and liquid mass flows.

0260 Series

0260 Series Power Supply, Smart Interface & Controller

The 0260 Smart Interface is a Microsoft® Windows® based software application that provides expanded control and monitoring capabilities in laboratory and research environments for Brooks Instrument thermal mass flow meters and controllers with an RS485 Smart protocol digital interface. Together with the power supply and RS485 to USB hardware module this product provides a great turnkey solution for monitoring and controlling up to thirty (30) MFCs and/or pressure controllers.

NRS™ Needle Control Valves

Low Flow Gas & Liquid Flow Control Valves

Models 8503F / 8504F

The Brooks® NRS™ (non-rising stem) flow control valves are designed specifically for extremely low flow gas and liquid applications. Straight and 90° angle pattern models in stainless steel are available. Ideal for rotameters with needle valves, the line allows needle valve flow control by adjusting a sliding tapered needle. This prevents sticking caused by foreign matter in the fluid. These flow control valves are particularly suitable for precise control requirements and possess a high turns-to-lift ratio. The flow is constant for any given stem position.

Six needles with different tapers provide a wide choice of flow ranges. Needles and orifices can be changed without removing the valve body from the line (two different orifices are used, one for needle sizes 1-3, another for sizes 4-6).

Power Supply, Readout & Set Point Controllers

Models 0251 / 0254
The 0250 Series is an innovative, reliable microcomputer-based controller providing power for up to four Brooks Instrument thermal mass flow, Quantim Coriolis mass flow, and/or pressure devices; all in a new compact design. Additionally, the 0250 Series can be used to generate flow set point commands, display flow rate, totalize flow, provide blending multiple flow streams, and more. This fully RoHS compliant device has a very user-friendly interface and is offered with multiple mounting capabilities such as rack mount (0254 only), panel mount, and table-top mount.

LR-056 Pressure Transducer Display

Local display of process pressure improves safety and quality control of gas delivery systems. The Brooks Instrument LR-056 is a miniature pressure transducer display for accurate point-of-use pressure monitoring.  It allows a 4-20 mA sensor, such as our SolidSense II® Series pressure transducers, to digitally display its pressure and send the signal to a final destination. The sensor connects to the back of the LR-056 with a 4-pin Bendix® connector and connects to the loop through a 2-wire pigtail cable. This device is loop powered and single channeled, and offers a real time reading. The LR-056 has two user programmable set points which define a window – if the window is entered or left an output signal is generated.

VDM300 DI Water Vapor Delivery Module

VDM300 DI Water Vapor Delivery Module

Highest flow accuracy for ultra-high purity deionized (DI) water vapor delivery.

Models VDM300

The Vapor Delivery Module (VDM) from Brooks Instrument is a high-performance, self-contained module for the highly accurate delivery of ultra-high purity deionized (DI) water vapor. It features a power efficient design that enables low temperature, ultra-high purity vapor generation. It utilizes a proven vapor delivery technique and combines it with advanced digital control and integrated diagnostic features in a small, convenient package.

Designed for advanced strip and post metal etch passivation processes, the VDM delivers improved accuracy, higher flow rates, wider control range and lower power consumption compared to flash evaporation systems. Based on proven thermal mass flow measurement techniques, the VDM produces vapor in a non-super-heated vapor state, reducing the aggressive effects of deionized water, for improved reliability and cleaner operation.

The VDM offers user-friendly data logging and diagnostic features via an independent service port and an intuitive graphic user interface.

XacTorr® Series

XacTorr® Series Capacitance Manometers

Minimize drift and thermal effects. Maximize vacuum process results.

Models CMX0 / CMX1 / CMX2 / CMX3

Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.

The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate. This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance.

The result: ultra-accurate, repeatable and efficient vacuum measurement that ensures each time you evacuate a chamber, it reaches the precise Torr your process requires for clean, contaminant-free production.

CMC Series

CMC Series Capacitance Manometers

Compact, proven unheated gauges for cost-effective vacuum measurement.

Models CMC

CMC Series capacitance manometers from Brooks Instrument deliver reliable, accurate vacuum measurement over a wide range of operating temperatures, providing an economical alternative to larger premium unheated gauges. Its compact design and proven performance make it an ideal upgrade for existing tools needing a small form-factor gauge.

Reliable and repeatable operation is assured in even the most aggressive processes through the all-welded design and Iconel® wetted surfaces. The combination of precision components and a wide temperature compensated operating range lets Brooks deliver best-in-class zero and span temperature coefficients for optimum measurement stability.

PC100 Series

PC100 Series Metal Sealed Pressure Controllers

Accuracy under pressure. Precision under control.

Models PC115 / PC125

The PC100 Series pressure controllers and meters combine a host of high-performance technology features to deliver a new level of pressure control accuracy and reliability to demanding semiconductor, vapor deposition and other ultra-precise manufacturing processes.

Built on the proven Brooks GF100 mass flow controller technology, the PC100 Series features a high-purity all-metal flow path, enhanced sensor technology engineered specifically to eliminate sensor drift and a user interface and device diagnostics capability that makes it much easier to conduct device evaluation and troubleshooting, resulting in limited service interruption and reduced downtime.

SLA7840

SLA7840 Metal Sealed Pressure Controller & Flow Meter

High purity flow path. Superior repeatability, stability and response time.

Models SLA7840

The Brooks model SLA7840 is a high purity metal sealed instrument that controls pressure while measuring flow rate. A remote pressure transducer signal, along with adjustable integral PID control electronics and a co-planar control valve, maintains the desired set pressure. The co-planar valve reduces sensitivity to pressure variations and offers lower leak-by rates compared to other metal sealed controllers ensuring a more stable process over time.

SLAMf10/20 Series

SLAMf Series Elastomer Sealed Pressure Controllers

Automate your pressure control even in the harshest environments.

Models SLAMf10 / SLAMf20

Whether it’s dust, moisture, temperature extremes or wash-down requirements, the SLAMf Series elastomer sealed pressure controllers deliver the precise accuracy and long-term stability of our proven SLA5800 family of thermal mass flow meters and controllers. A specially engineered NEMA4X/IP66 enclosure protects our advanced digital electronics and ensures stable, accurate pressure measurement and control of your process-critical gas and liquid mass flows.

SLA10/20/40 Series

SLA5800 Series Elastomer Sealed Pressure Controllers

Automate your pressure control. Eliminate droop and hysteresis.

Models SLA5810 / SLA5820 / SLA5840

With a wide range of options and features available, the SLA5800 Series pressure controllers enable you to automate your pressure control and take advantage of the process consistency benefits from using a single platform when combined with our industry-leading SLA5800 Series mass flow controllers and meters.

The SLA5800 Series features high accuracy, high zero stability and high repeatability performance backed by our superior metrology systems and methods using primary flow calibration systems directly traceable to international standards.

5866RT

5866RT Elastomer Sealed Pressure Controller & Flow Meter

Versatility for high pressure applications across a wide flow measurement range.

Models 5866RT

The Brooks model 5866RT metal or elastomer sealed pressure controller and flow meter controls pressure while also measuring flow rate. Model 5866RT receives a remote pressure transducer signal, and using adjustable integral PID control electronics and control valve, will maintain a desired set pressure. With options in seals, electro-polished wetted surfaces and a wide pressure and flow measurement range, 5866RT delivers proven results across a broad range of processes.

SolidSense II® Series

SolidSense II® Pressure Transducers

Maximize process precision with accurate, stable, ultra-high purity control.

Models GF / GI

For measuring pressure in ultra-high purity and specialty gas applications across many industries, pressure transmitters and transducers must maintain stability and accuracy. That’s why Brooks Instrument SolidSense II® high pressure transducers combine weld-free, corrosion-resistant materials along with a design that delivers outstanding zero stability and accuracy within 0.25% of full scale.

We avoid the problems of zero and span drift, thermal shift and case stress that lead to maintenance and downtime issues with competitive high pressure transducers. Instead, SolidSense II® instruments deliver a robust, easy-to-maintain design that lowers the total cost of ownership.

122 Series Pressure Switches and Transmitters

122 Series Mechanical Pressure Switches & Transmitters

Versatile, local or remote indication of system pressure for high-purity applications.

Models IPS122 / IPT122

The Brooks Instrument 122 Series mechanical pressure gauges were designed and developed for the demanding high-purity applications of the semiconductor industry. Made of stainless steel, our mechanical pressure gauges feature an accuracy of 1% of full scale. These two inch gauges are durable measuring devices that come in a variety of process connections, pressure ranges, and socket orientations, offering a reliable and efficient way to monitor pressure locally. Get precise, high-performance results from the world’s leading pressure gauge supplier.

122 Series Pressure Gauges

122 Series Mechanical Pressure Gauges

Reliable, efficient local pressure monitoring for high-purity applications.

Models S122 / C122 / F122

The Brooks Instrument 122 Series mechanical pressure gauges were designed and developed for the demanding high-purity applications of the semiconductor industry. Made of stainless steel, our mechanical pressure gauges feature an accuracy of 1% of full scale. These two inch gauges are durable measuring devices that come in a variety of process connections, pressure ranges, and socket orientations, offering a reliable and efficient way to monitor pressure locally. Get precise, high-performance results from the world’s leading pressure gauge supplier.

8600 Series

8600 Series Mechanical Pressure Regulators

High precision, finer control.

Models 8601

The 8600 Series mechanical pressure regulator offers exceptional pressure output precision by virtue of its high-resolution control of the supply pressure. The pressure regulator unit provides bubble-tight shut-off on helium at 7 bar.

MT3809 Series

MT3809 Series Metal Tube Variable Area Flow Meters

Widest temperature, pressure and process range. One proven flow meter.

Models 3809G / 3809G ELF / 3809G TFE Lined / 3810G

Engineered to work where you need it: Choose the MT3809 variable area (VA) max flow meter (rotameter) for all the high-pressure, high-temperature VA flow measurement and control requirements on your next project.

Proven to deliver reliable, repeatable gas and liquid flow measurement and control in thousands of installed locations, the MT3809 is practical and economical, making it the “go-to” choice for Engineering Procurement Contractors (EPC) and major industrial facilities worldwide.

The MT3809G configuration features a digital LCD display with local operator interface, providing valuable process outputs such as totalization and alarm signals. It also lets users make parameter changes without removing the cover, which means changes can be made even in hazardous areas.

MT3750 Series

MT3750 Series Metal Tube Variable Area Flow Meters

Accurate low-flow measurement. Long-lasting performance in harsh environments.

Models 3750C

Need reliable, durable flow measurement in high-pressure, high-temperature or hazardous process settings? The MT3750 metal tube variable area low flow meter from Brooks Instrument is your hard-working answer.

Constructed from high-strength steel, the MT3750 Series VA low flow meter features a compact design and multiple threaded and flange connection options to make it easier to install and integrate into existing plants, as well as a cost-effective replacement for glass tube flow meters. Certified explosion proof, our low flow liquid flow meters also offer optional transmitters or inductive alarms for more advanced flow measurement and process data capture operations.

FC Series

FC Series Manual Flow Controllers

Precise fluid controllers ensure constant pressure across valves.

Models FC8744 / FC8800 / FC8900

Supply or discharge pressures may vary. But with flow controllers from Brooks Instrument, the differential pressure across the integral manual flow regulating valve remains constant. An internal diaphragm-actuated control valve receives incoming pressure on one side and outlet pressure with spring action on the other. This design balances pressure variations to maintain a fixed differential pressure across the valve that ensures constant flow. The result is precise flow control for many gas and liquid-service applications. Can be used as a stand alone flow controller or integrally mounted to a flow meter to save space and improve installation.

GT130x Series

GT130x Series Glass Tube Variable Area Flow Meters

Efficient and cost-effective for moderate accuracy requirements. Full-View® 1100 Series replacements.

Models 1305 / 1306 / 1307

The GT130x Series glass tube VA flow meters are a family of versatile and economical meters designed for general use in applications with moderate metering accuracy requirements — typical accuracy ranges are 1% to 10% full scale, depending on the model selected. They are ideal for purge type service, seal oil systems, bearing lubrication and cooling water indication, and offer o-ring seal construction with ten-to-one rangeability, as well as a wide range of float types and capacity ranges.

The GT130x Seal Series flow meters provide an excellent and modular drop-in replacement for existing Brooks Instrument Full-View® 1100 Series meters: models 1110, 1114, 1140, 1144.

GT1000 Series

GT1000 Series Glass Tube Variable Area Flow Meters

Simple design. Rugged performance for high flow rates.

Models 1020N / 1024N / 1026N / 1027N

The GT1000 Series glass tube VA flow meter from Brooks Instrument is easy to read and uses simplicity of design with rugged, long-lasting flow measurement performance for a wide range of high-flow gas and liquid applications where viewing the process is important.

Featuring a clear and easy-to-read scale, the GT1000 Series O-ring seal design minimizes process downtime by allowing for convenient in-line removal of the glass tube for cleaning and maintenance. Reliable, with only one moving part, it is globally approved for use in hazardous environments.

Sho-Rate Series

Sho-Rate™ Series Glass Tube Variable Area Flow Meters

Proven performance for low flow rates. Versatile options to match your needs.

Models 1250A / 1255A / 1350G / 1355G / 1358

For a wide range of chemical, petrochemical, biotechnology, research and analytical applications, Sho-Rate™ Series glass tube variable area flow meters provide industry-leading repeatability and reliability in two versatile lines.

Sho-Rate™ 1350/1355 flow meters deliver up to 3% accuracy and 0.25% repeatability depending on the model. Sho-Rate™ 1250/1255 flow meters offer a durable, cost-effective design to meet OEM requirements for systems requiring metering and analyzer integrators.

3000 Series

3000 Series Polycarbonate Tube Variable Area Flow Meters

Durable and accurate. For exposed panel-mounted applications.

Models 3000

Economy combined with accuracy: MR3000 Series variable area flow meters from Brooks Instrument provide a proven, easy-to-read device to monitor and control air and water flows. Well-suited for easy integration into industrial instrument panels, MR3000 Series VA flow meters are constructed of high-impact resistant polycarbonate and are available with 24 different air and water ranges.

2500 Custom Solutions

2500 Series Custom Solutions Acrylic Tube Variable Area Flow Meters

Start with precision machining. Add customized options.

For applications where measuring air, water or gas flow requires non-standard features, our 2500 Series Custom Solutions gives you three levels of customization and price points to meet your specific project or OEM requirements.

The 2500 Series Custom Solutions start with the same precision-machined, unibody, acrylic construction used in our standard 2500 Series design. Then you can choose from a range of customization options – changing basic features like scale and logo and even physical attributes like body shape and inlet/outlet orientation.

2500 Series

2500 Series Acrylic Tube Variable Area Flow Meters

Precision-machined acrylic. Economical liquid or gas measurement.

Models 2510 / 2520 / 2530 / 2540S or V / 2540I

Seeking an affordable solution for non-corrosive and low-pressure applications? Now there’s a clear choice: 2500 Series plastic variable area flow meters.

Constructed from precision-machined acrylic, 2500 Series flow meters use annealed, unibody construction that eliminates the leaks and panel detachment common with non-annealed, molded designs. An easy-to-read scale, rod-guided float and positive-stop valve ensure performance and safety. Choose from several valve, fitting, o-ring and float options to fit your specific project.

Quantim Series

Quantim® Series Coriolis Mass Flow Controllers & Meters

The industry standard for low-flow Coriolis measurement and control.

Models QMBC2 / QMBM2 / QMBC3 / QMBM3 / QMBC4 / QMBM4

Achieve superior accuracy and unmatched zero stability in ultra-low-flow gas and liquid measurement and control with the Quantim® Coriolis mass flow controllers and meters from Brooks Instrument. With the Quantim® series, Brooks has taken the lead in driving improvements in Coriolis flow technology: Our patented Quantim® Coriolis sensor design measures low flows independent of fluid type or process variables. The result: unsurpassed performance – the most accurate, stable, repeatable and reproducible mass flow measurement and control, even under changing conditions.

5850EMH Series

5850EMH Series High Temperature Mass Flow Controllers

Proven long-term stability. Ultra-pure performance for high temperature applications.

Models 5850EMH / 5851EMH

Offering state of the art performance in high temperature gas measurement and control, the 5850EMH Series high temperature metal sealed mass flow controller from Brooks Instrument combines the outstanding leak integrity of metal seals with a variety of options allowing maximum application flexibility. The heart of the 5850EMH Series is the highly stable sensor which provides an electrical output signal linear with flow rate. This signal is used for indicating, recording and/or control purposes without the need for an auto-zero circuit.

5850EM Series

5850EM Series Metal Sealed Thermal Mass Flow Controllers

Proven long-term stability. Ultra-pure performance for high pressure applications.

Models 5850EM / 5851EM

5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E & i Series MFCs. Its metal sealed construction and electro-polished wetted surfaces ensure outstanding flow integrity and help improve overall process efficiency by eliminating the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.

GF80 Series

GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters

Raises the standard in performance for value-driven metal sealed applications.

Models GF80

For many industrial and semiconductor processes, both performance and cost efficiency are crucial. The GF80 Series metal sealed mass flow controllers and meters deliver both: Engineered using the same fast response sensor and patented 4th generation MultiFlo™ technology as our best-selling GF100 series, it’s the right choice for operations that need high performance at a value price point. Moving to a metal sealed MFC brings the full benefit of MultiFloTM multi-gas/multi-range capability since there are no limitations in gases that can be used, enhanced purity of the gas due to elimination of oxygen permeation through elastomers, and a reduction in maintenance since metal seals will last indefinitely.

GF100 Series

GF100 Series Metal Sealed Thermal Mass Flow Controllers & Meters

High purity flow path. Outstanding performance, reliability, and repeatability.

Models GF100 / GF101 / GF120 / GF120XSL / GF120XSD / GF121

Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.

The result: increased process flexibility and efficiency combined with the industry’s highest levels of process gas purity to help maximize yields and productivity.

GF100 Series EtherCAT

The Fastest and Most Accurate MFCs

Enhanced with the Speed of EtherCAT®

Models GF100 / GF101 / GF120 / GF120XSD / GF120XSL / GF121 / GF125 / GF126

Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to bring PTI mass flow control technology to market, GF125 minimizes process gas flow variation due to pressure and temperature fluctuations. Standard MultiFlo™ technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.

The result: reduced size and cost of gas panels, by eliminating the need for point of use pressure regulators, pressure transducers, and associated hardware, combined with the industry’s best PTI performance to maximize yields and productivity.

GF125 Series

GF125 Series Metal Sealed Thermal Mass Flow Controllers & Meters

The MFC that has it all.

Models GF125 / GF126

Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to bring PTI mass flow control technology to market, GF125 minimizes process gas flow variation due to pressure and temperature fluctuations. Standard MultiFlo™ technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.

The result: reduced size and cost of gas panels, by eliminating the need for point of use pressure regulators, pressure transducers, and associated hardware, combined with the industry’s best PTI performance to maximize yields and productivity.