GF125 Series

GF125 Series Metal Sealed Thermal Mass Flow Controllers & Meters

The MFC that has it all.

Models GF125 / GF126

Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to bring PTI mass flow control technology to market, GF125 minimizes process gas flow variation due to pressure and temperature fluctuations. Standard MultiFlo™ technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.

The result: reduced size and cost of gas panels, by eliminating the need for point of use pressure regulators, pressure transducers, and associated hardware, combined with the industry’s best PTI performance to maximize yields and productivity.

Features

Long-term zero stability of <±0.5% full scale per year
Ultra-fast settling times: 300 ms – <700 ms
Full-scale flow rates up to 300 slpm
Ultra-high purity flow path – 4µ inch Ra surface finish
SEMI F20 compliant wetted materials
Corrosion-resistant Hastelloy® T-Rise sensor with high speed ARM processor
Fast acting, diaphragm-free valve assembly is unaffected by differential pressure and tested for over seven million cycles without any failures
MultiFlo^TM technology offers unparalleled flexibility—one device can be programmed for thousands of different gas and flow range configurations without removing the MFC from the gas line or compromising accuracy
Local display indicates flow, temperature, pressure and network address for easy troubleshooting of gas supply and isolation valve issues
DeviceNet^TM, RS-485 L-Protocol and analog interfaces

Benefits

By combining Brooks’ patented flow sensor technology with a fast acting diaphragm free valve assembly, the GF125 Series delivers up to 3 times faster response and settling time compared to other mass flow controllers
Optimized wetted flow path for improved dry-down
With MultiFlo^TM, MFC full scale flow range can be re-scaled down typically by a factor of 3:1 with no impact on accuracy, turndown or leak by specifications, for optimum process and inventory flexibility
A full gas database delivers the widest process gas coverage
Pressure Transient Insensitivity (PTI) capability overcomes limitations of conventional MFCs that react strongly to small inlet pressure fluctuations. The result is stable performance and predictable accuracy.
Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting

Key Applications

Semiconductor
MOCVD
Gas flow control applications that require a high purity all-metal flow path

Specifications

Performance Mechanical Ratings Diagnostics & Display Electrical Compliance

Product Type	Mass Flow Controller
Differentiator	Ultra-High Purity Ultra-Fast Response Time Pressure Transient Insensitivity
Flow Range (Full Scale Capacity)	3 sccm – 300 slm
Accuracy	±1% S.P. > 35-100% ±0.35% F. S. 2-35%
Repeatability	< ±0.15% S.P.
Linearity	±0.5% F.S. (included in accuracy)
Response Time	300ms – < 1 sec
Response Time	Normally Open Valve: <1.5 sec (specific models only)
Multi-Gas & Range Configurability	MultiFlo™ Standard (most models)
Pressure Transient Insensitivity	<5% S.P. for up to 5 psi/sec upstream press. spike
Control Range	< 5 – 100%
Number of Bins	Standard GF Series: 11 bins High Flow GF Series: 4 bins
Valve Shut Down	< 2% F.S.
Zero Stability	< ±0.5% F.S. per year
Flow Temperature Coefficient	Span: 0.05% S.P. per °C Zero: 0.005% F.S. per °C
Seal Material	Metal
Level of Purity / Surface Finish	4 – 5µ inch Ra
Wetted Materials	SEMI F20 HP Compliant 316L VIM/VAR Hastelloy C-22 316L Stainless Steel 304 Stainless Steel KM-45
Valve Options	Normally Closed Normally Open (specific models) Meter (no valve)
Max Temperature	50^oC
Differential Pressure Range	3-860 sccm = 7-45 psid 861 – 7200 sccm = 10 – 45 psid 7201 – 55000 sccm = 15 – 45 psid 51 – 300 slm = 30 – 90 psid *Typical pressure drops. Contacts Brooks Technical Support for more information.
Max Pressure	Standard GF Series: 100 psia max High Flow GF Series: 75 psig (controller), 150 psig (meter)
Leak Integrity	1×10^-10 atm cc/sec He
Diagnostic Capability	Available
Status Lights	MFC Health Network Status
Alarms	Control Valve Output Network Interruption
Diagnostic / Service Port	RS485 via 2.5mm jack (all models)
Display	Top Mount Integrated LCD Viewing Angle: Fixed Viewing Distance: 10 feet Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa) Resolution: 0.1 (unit)
Analog Communication	0-5 Vdc
Digital Communication	DeviceNet™ RS485 L-Protocol
Electrical Connection	Analog/RS485 via 9-Pin “D” connector DeviceNet™ via 5-Pin “M12” connector Various cable adaptors available. See product data sheet for more information.
Power Supply / Consumption	Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%) DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc (Under typical operating conditions)
Environmental Compliance	RoHS Directive (2011/65/EU) REACH Directive EC 1907/2006
EMC	EC Directive 2004/108/EC CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

BCN (+34) 93 864 68 43

MAD (+34) 91 864 6843

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