GF125 Series

GF125 Series Metal Sealed Thermal Mass Flow Controllers & Meters

The MFC that has it all.

Models GF125 / GF126

Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to bring PTI mass flow control technology to market, GF125 minimizes process gas flow variation due to pressure and temperature fluctuations. Standard MultiFlo™ technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.

The result: reduced size and cost of gas panels, by eliminating the need for point of use pressure regulators, pressure transducers, and associated hardware, combined with the industry’s best PTI performance to maximize yields and productivity.

Description

Features
  • Long-term zero stability of <±0.5% full scale per year
  • Ultra-fast settling times: 300 ms – <700 ms
  • Full-scale flow rates up to 300 slpm
  • Ultra-high purity flow path – 4µ inch Ra surface finish
  • SEMI F20 compliant wetted materials
  • Corrosion-resistant Hastelloy® T-Rise sensor with high speed ARM processor
  • Fast acting, diaphragm-free valve assembly is unaffected by differential pressure and tested for over seven million cycles without any failures
  • MultiFloTM technology offers unparalleled flexibility—one device can be programmed for thousands of different gas and flow range configurations without removing the MFC from the gas line or compromising accuracy
  • Local display indicates flow, temperature, pressure and network address for easy troubleshooting of gas supply and isolation valve issues
  • DeviceNetTM, RS-485 L-Protocol and analog interfaces
Benefits
  • By combining Brooks’ patented flow sensor technology with a fast acting diaphragm free valve assembly, the GF125 Series delivers up to 3 times faster response and settling time compared to other mass flow controllers
  • Optimized wetted flow path for improved dry-down
  • With MultiFloTM, MFC full scale flow range can be re-scaled down typically by a factor of 3:1 with no impact on accuracy, turndown or leak by specifications, for optimum process and inventory flexibility
  • A full gas database delivers the widest process gas coverage
  • Pressure Transient Insensitivity (PTI) capability overcomes limitations of conventional MFCs that react strongly to small inlet pressure fluctuations. The result is stable performance and predictable accuracy.
  • Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
Key Applications
  • Semiconductor
  • MOCVD
  • Gas flow control applications that require a high purity all-metal flow path
Specifications

Product Type

Mass Flow Controller

Differentiator

Ultra-High Purity
Ultra-Fast Response Time
Pressure Transient Insensitivity

Performance

Flow Range (Full Scale Capacity)

3 sccm – 300 slm

Accuracy

±1% S.P. > 35-100%
±0.35% F. S. 2-35%

Repeatability

< ±0.15% S.P.

Linearity

±0.5% F.S. (included in accuracy)

Response Time

300ms – < 1 sec

Response Time

Normally Open Valve: <1.5 sec
(specific models only)

Multi-Gas & Range Configurability

MultiFlo™ Standard (most models)

Pressure Transient Insensitivity

<5% S.P. for up to 5 psi/sec upstream press. spike

Control Range

< 5 – 100%

Number of Bins

Standard GF Series: 11 bins
High Flow GF Series: 4 bins

Valve Shut Down

< 2% F.S.

Zero Stability

< ±0.5% F.S. per year

Flow Temperature Coefficient

Span: 0.05% S.P. per °C
Zero: 0.005% F.S. per °C

Mechanical

Seal Material

Metal

Level of Purity / Surface Finish

4 – 5µ inch Ra

Wetted Materials

SEMI F20 HP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel
KM-45

Valve Options

Normally Closed
Normally Open (specific models)
Meter (no valve)

Ratings

Max Temperature

50oC

Differential Pressure Range

3-860 sccm = 7-45 psid
861 – 7200 sccm = 10 – 45 psid
7201 – 55000 sccm = 15 – 45 psid
51 – 300 slm = 30 – 90 psid
*Typical pressure drops. Contacts Brooks Technical Support for more information.

Max Pressure

Standard GF Series: 100 psia max
High Flow GF Series: 75 psig (controller), 150 psig (meter)

Leak Integrity

1×10-10 atm cc/sec He

Diagnostics & Display

Diagnostic Capability

Available

Status Lights

MFC Health
Network Status

Alarms

Control Valve Output
Network Interruption

Diagnostic / Service Port

RS485 via 2.5mm jack (all models)

Display

Top Mount Integrated LCD
Viewing Angle: Fixed
Viewing Distance: 10 feet
Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)
Resolution: 0.1 (unit)

Electrical

Analog Communication

0-5 Vdc

Digital Communication

DeviceNet™
RS485 L-Protocol

Electrical Connection

Analog/RS485 via 9-Pin “D” connector
DeviceNet™ via 5-Pin “M12” connector
Various cable adaptors available. See product data sheet for more information.

Power Supply / Consumption

Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)
DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc
(Under typical operating conditions)

Compliance

Environmental Compliance

RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006

EMC

EC Directive 2004/108/EC
CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

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