Models GF125 / GF126
Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to bring PTI mass flow control technology to market, GF125 minimizes process gas flow variation due to pressure and temperature fluctuations. Standard MultiFlo™ technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.
The result: reduced size and cost of gas panels, by eliminating the need for point of use pressure regulators, pressure transducers, and associated hardware, combined with the industry’s best PTI performance to maximize yields and productivity.
Features
|
Benefits
|
Key Applications
|
Specifications |
Performance Mechanical Ratings Diagnostics & Display Electrical Compliance
| Product Type | Mass Flow Controller |
| Differentiator | Ultra-High Purity Ultra-Fast Response Time Pressure Transient Insensitivity |
| Flow Range (Full Scale Capacity) | 3 sccm – 300 slm |
| Accuracy | ±1% S.P. > 35-100% ±0.35% F. S. 2-35% |
| Repeatability | < ±0.15% S.P. |
| Linearity | ±0.5% F.S. (included in accuracy) |
| Response Time | 300ms – < 1 sec |
| Response Time | Normally Open Valve: <1.5 sec (specific models only) |
| Multi-Gas & Range Configurability | MultiFlo™ Standard (most models) |
| Pressure Transient Insensitivity | <5% S.P. for up to 5 psi/sec upstream press. spike |
| Control Range | < 5 – 100% |
| Number of Bins | Standard GF Series: 11 bins High Flow GF Series: 4 bins |
| Valve Shut Down | < 2% F.S. |
| Zero Stability | < ±0.5% F.S. per year |
| Flow Temperature Coefficient | Span: 0.05% S.P. per °C Zero: 0.005% F.S. per °C |
| Seal Material | Metal |
| Level of Purity / Surface Finish | 4 – 5µ inch Ra |
| Wetted Materials | SEMI F20 HP Compliant 316L VIM/VAR Hastelloy C-22 316L Stainless Steel 304 Stainless Steel KM-45 |
| Valve Options | Normally Closed Normally Open (specific models) Meter (no valve) |
| Max Temperature | 50oC |
| Differential Pressure Range | 3-860 sccm = 7-45 psid 861 – 7200 sccm = 10 – 45 psid 7201 – 55000 sccm = 15 – 45 psid 51 – 300 slm = 30 – 90 psid *Typical pressure drops. Contacts Brooks Technical Support for more information. |
| Max Pressure | Standard GF Series: 100 psia max High Flow GF Series: 75 psig (controller), 150 psig (meter) |
| Leak Integrity | 1×10-10 atm cc/sec He |
| Diagnostic Capability | Available |
| Status Lights | MFC Health Network Status |
| Alarms | Control Valve Output Network Interruption |
| Diagnostic / Service Port | RS485 via 2.5mm jack (all models) |
| Display | Top Mount Integrated LCD Viewing Angle: Fixed Viewing Distance: 10 feet Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa) Resolution: 0.1 (unit) |
| Analog Communication | 0-5 Vdc |
| Digital Communication | DeviceNet™ RS485 L-Protocol |
| Electrical Connection | Analog/RS485 via 9-Pin “D” connector DeviceNet™ via 5-Pin “M12” connector Various cable adaptors available. See product data sheet for more information. |
| Power Supply / Consumption | Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%) DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc (Under typical operating conditions) |
| Environmental Compliance | RoHS Directive (2011/65/EU) REACH Directive EC 1907/2006 |
| EMC | EC Directive 2004/108/EC CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing) |
