Models GF100 / GF101 / GF120 / GF120XSD / GF120XSL / GF121 / GF125 / GF126
Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to bring PTI mass flow control technology to market, GF125 minimizes process gas flow variation due to pressure and temperature fluctuations. Standard MultiFlo™ technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.
The result: reduced size and cost of gas panels, by eliminating the need for point of use pressure regulators, pressure transducers, and associated hardware, combined with the industry’s best PTI performance to maximize yields and productivity.
Key Applications
Performance Perfected for Semiconductor Processes
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Features
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BenefitsExceptional performance
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Specifications |
Mechanical Performance Ratings Diagnostics & Display Electrical
| Product Type | Mass Flow Controller |
| Differentiator | EtherCAT Communication High Purity/Ultra-High Purity Embedded Diagnostics Ultra-stable Flow Sensor Improved Valve Shutdown |
| Level of Purity / Surface Finish | 5 – 10µ inch Ra |
| Seal Material | Metal |
| Flow Temperature Coefficient | Span: 0.05% S.P. per °C Zero: 0.005% F.S. per °C |
| Zero Stability | < ±0.15% F.S. per year |
| Valve Shut Down | Standard GF Series: < 0.15% F.S. High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out |
| Number of Bins | Standard GF Series: 11 bins High-Flow GF Series: 4 bins |
| Control Range | Standard GF Series: 2-100% High Flow GF Series: 5-100% |
| Multi-Gas & Range Configurability | MultiFlo™ Standard (most models) |
| Pressure Transient Insensitivity | Specific models |
| Response Time | Normally Open Valve: <1.5 sec (specific models) |
| Response Time | Normally Closed Valve: 300 ms – < 1 sec SDS Gas Delivery: < 3 sec |
| Repeatability | < ±0.15% S.P. |
| Accuracy | Standard GF Series: ±1% S.P. > 20-100%; ±0.2% F.S. 2-20% High Flow GF Series: ±1% S.P. > 35-100%; ±0.35% F.S. 2-35% |
| Flow Range (Full Scale Capacity) | Standard GF Series: 3 sccm – 55 slm High Flow GF Series: 55 slm – 300 slm |
| Wetted Materials | SEMI F20 HP/UHP Compliant 316L VIM/VAR Hastelloy C-22 316L Stainless Steel 304 Stainless Steel KM-45 |
| Valve Options | Normally Closed Normally Open (specific models only) Meter (no valve) |
| Max Temperature | 50oC |
| Differential Pressure Range | 3-860 sccm = 7-45 psid 861-7200 sccm = 10-45 psid 7201-55000 sccm = 15-45 psid 51 slm-300 slm = 30-90 psid SDS Models 10 Torr- 30 psid typical *Typical pressure drops. Contact Brooks Technical Support for more information. |
| Max Pressure | Standard GF Series: up to 500 psia max High Flow GF Series: 75 psig (controller), 150 psig (meter) |
| Leak Integrity | 1×10-10 atm cc/sec He |
| Diagnostic Capability | Available |
| Status Lights | Run Error Power Network Status |
| Alarms | Control Valve Output Network Interruption Temperature High/Low Pressure High/Low Power Surge/Sag |
| Power Supply / Consumption | 24 Vdc, 7 Watts (Under typical operating conditions) |
| Electrical Connection | Power via 5-pin M8 Connector, EtherCAT via twin RJ45 |
| Digital Communication | EtherCAT® |
| Analog Communication | — |
| Display | Top Mount Integrated LCD Viewing Angle: Fixed Viewing Distance: 10 feet Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa) Resolution: 0.1 (unit) |
| Diagnostic / Service Port | Micro USB |
