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GF100 Series
GF100 Series - Image 2
GF100 Series - Image 3

GF100 Series

GF100 Series Metal Sealed Thermal Mass Flow Controllers & Meters

High purity flow path. Outstanding performance, reliability, and repeatability.

Models GF100 / GF101 / GF120 / GF120XSL / GF120XSD / GF121

Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFloTM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.

The result: increased process flexibility and efficiency combined with the industry’s highest levels of process gas purity to help maximize yields and productivity.

Features

  • Long-term zero stability of <±0.5% full scale per year
  • Settling times: 700 ms – <1 second
  • Full-scale flow rates up to 300 slpm
  • All-metal seal flow path: option for 4µ or 10µ inch Ra surface finish
  • Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures
  • MultiFloTM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
  • Local display
  • Optional SDS gas delivery
  • DeviceNetTM, RS-485 L-Protocol and analog interfaces

Benefits

  • High-performance components marathon tested to seven times semiconductor industry standards for reliability
  • All metal, corrosion resistant flow path with reduced surface area and unswept volumes ensures faster dry-down during purge steps
  • With MultiFloTM, new process gases and/or ranges can be set in under 60 seconds – no more removing and calibrating MFCs
  • Highly configurable platform enables drop-in replacement and upgrade of most brands of metal sealed MFCs, including the former Celerity, Mykrolis, Tylan and UNIT brands
  • GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes
  • Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting

Key Applications

  • Semiconductor etch tools
  • Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
  • Physical vapor deposition (PVD) systems
  • Epitaxial process systems

Specifications

Performance Mechanical Ratings Diagnostics & Display Electrical

Product Type Mass Flow Controller
Differentiator High Purity/Ultra-High Purity
Standard GF Series
High Flow GF Series
Flow Range (Full Scale Capacity) Standard GF Series: 3 sccm – 55 slm
High Flow GF Series: 55 slm – 300 slm
Accuracy ±1% S.P. > 35-100%
±0.35% F.S. 2-35%
Repeatability < ±0.15% S.P.
Linearity ±0.5% F.S. (included in accuracy)
Response Time Normally Closed Valve: 700 ms – < 1 sec
SDS Gas Delivery: < 3 sec
Response Time Normally Open Valve: <1.5 sec (specific models)
Multi-Gas & Range Configurability MultiFlo™ Standard (most models)
Pressure Transient Insensitivity —
Control Range Standard GF Series: < 3-100%
High Flow GF Series: 5-100%
Number of Bins Standard GF Series: 11 bins
High-Flow GF Series: 4 bins
Valve Shut Down Standard GF Series: < 1% F.S.
High Flow GF Series: < 2% F.S. @ 30 N2 psig/atm out
Zero Stability < ±0.5% F.S. per year
Flow Temperature Coefficient Span: 0.05% S.P. per °C
Zero: 0.005% F.S. per °C
Seal Material Metal
Level of Purity / Surface Finish 4 – 10µ inch Ra
Wetted Materials SEMI F20 HP/UHP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel
KM-45
Valve Options Normally Closed
Normally Open (specific models only)
Meter (no valve)
Max Temperature 50oC
Differential Pressure Range 3-860 sccm = 7-45 psid
861-7200 sccm = 10-45 psid
7201-55000 sccm = 15-45 psid
51 slm-300 slm = 30-90 psid
*Typical pressure drops. Contact Brooks Technical Support for more information.
Max Pressure Standard GF Series: 500 psia max
High Flow GF Series: 75 psig (controller), 150 psig (meter)
Leak Integrity 1×10-10 atm cc/sec He
Diagnostic Capability Available
Status Lights MFC Health
Network Status
Alarms Control Valve Output
Network Interruption
Diagnostic / Service Port RS-485 via 2.5mm jack (all models)
Display Top Mount Integrated LCD
Viewing Angle: Fixed
Viewing Distance: 10 feet
Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)
Resolution: 0.1 (unit)
Analog Communication 0-5 Vdc
Digital Communication DeviceNet™
RS485 L-Protocol
Electrical Connection Analog/RS485 via 9-Pin “D” connector
DeviceNet™ via 5-Pin “M12” connector
Various cable adaptors available. See product data sheet for more information.
Power Supply / Consumption Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)
DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc
(Under typical operating conditions)
Compliance
EMC EC Directive 2004/108/EC
CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Environmental Compliance RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006

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