Models 5850EMH / 5851EMH
Offering state of the art performance in high temperature gas measurement and control, the 5850EMH Series high temperature metal sealed mass flow controller from Brooks Instrument combines the outstanding leak integrity of metal seals with a variety of options allowing maximum application flexibility. The heart of the 5850EMH Series is the highly stable sensor which provides an electrical output signal linear with flow rate. This signal is used for indicating, recording and/or control purposes without the need for an auto-zero circuit.
Features
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Benefits
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Key Applications
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Specifications |
Performance Ratings Electrical
| Product Type | Mass Flow Controller |
| Linearity | Included in accuracy. |
| Repeatability | <±0.25% SP |
| Accuracy | 1% of FS |
| Flow Range (Full Scale Capacity) | 100 slm (N2 equivalent) |
| Differentiator | Highest Flow Range Proven, reliable technology |
| Response Time | <3 sec to within 2% of SP (per SEMI E17-91) |
| Zero Stability | |
| Mechanical | |
| Seal Material | Metal |
| Level of Purity / Surface Finish | — |
| Wetted Materials | 316L, 316L VAR, & high alloy ferric SS |
| Valve Options | Normally Open Normally Closed |
| Max Temperature | 105oC |
| Differential Pressure Range | 50 – 350 kPa (7 – 50 psid) |
| Max Pressure | 1 MPa (145 psi) |
| Leak Integrity | 1×10-10 atm cc/sec He (1×10-11 Pa m3 /sec) ±15 Vdc @ 350 mA (max) |
| Electrical Connection | 15-Pin “D” connector |
| Digital Communication | – |
| Analog Communication |
0-5 Vdc |
| Diagnostic Capability | – |
