VDM300 DI Water Vapor Delivery Module

VDM300 DI Water Vapor Delivery Module

Highest flow accuracy for ultra-high purity deionized (DI) water vapor delivery.

Models VDM300

The Vapor Delivery Module (VDM) from Brooks Instrument is a high-performance, self-contained module for the highly accurate delivery of ultra-high purity deionized (DI) water vapor. It features a power efficient design that enables low temperature, ultra-high purity vapor generation. It utilizes a proven vapor delivery technique and combines it with advanced digital control and integrated diagnostic features in a small, convenient package.

Designed for advanced strip and post metal etch passivation processes, the VDM delivers improved accuracy, higher flow rates, wider control range and lower power consumption compared to flash evaporation systems. Based on proven thermal mass flow measurement techniques, the VDM produces vapor in a non-super-heated vapor state, reducing the aggressive effects of deionized water, for improved reliability and cleaner operation.

The VDM offers user-friendly data logging and diagnostic features via an independent service port and an intuitive graphic user interface.

Description

Features
  • Flow range: 3 slpm (DIW vapor)
  • Direct water vapor measurement with superior flow accuracy
  • Connects directly to the house deionized water supply
  • Operates at lower temperatures (non-superheated state)
  • Optimized design for flushing and draining
  • EtherCAT digital communications
  • Brooks Expert Support Tool (BEST) graphical user interface
Benefits
  • Utilizes proven, reliable thermal mass flow measurement and control technique
  • Highly tolerant of varying fab DI water supply pressure
  • Improved corrosion resistance in wetted path
  • Ensures cleaner operation
  • Tool interface using analog or digital communications
  • Direct user interface for enhanced data collection or troubleshooting
Applications
  • Silicon semiconductor post-metal etch process
  • Silicon semiconductor metal strip process
  • Ultra-high purity humidification in sub-atmospheric environments
Specifications

Product Type

DI Water Vapor Delivery Module

Differentiator

Ultra High Purity DIW Vapor
Highest Flow Accuracy
Compact Design
EtherCAT interface

Vaporization Method

Vapor Draw

Fluid Type

UHP DI Water

Flow Range (Full Scale Capacity)

3000 sccm

Turndown Ratio

20:1

Response Time

<2 sec

Accuracy

±1% SP @ >10% FS
±0.2% FS @ 5 – 10% FS

Linearity

±0.5% of FS

Repeatability

<±0.2% FS

Flow Temperature Coefficient

0.05% per °C zero and span

Valve Shut Down

Normally Closed Valve: <0.5% FS

Electrical

Analog Communication

0 to 5-24 Vdc

Digital Communication

EtherCAT via dual RJ-45 jacks
Diagnostic (RS485) via microUSB

Electrical Connection

208-230 Vac, 50/60 Hz, 290 Watts Nominal (tank heater)
± 15 Vdc, ± 5% @ 1.2 amp (MFC heater and PCBA)

Status Lights

Zero
Device Ready
Warm Up
Device Fault
ECAT Error
EtherCAT Run
EtherCAT Link Active

Diagnostic / Service Port

RS-485 via microUSB

Fittings

Outlet Vapor: 1/2″ Female VCR
Inlet DI Water: 1/4″ Male VCR or Tube Compression
DI Water Drain: 1/8″ Instant Tube Fitting

Mounting Orientation

Vertical with DIW inlet fittings down

Ratings

Max Pressure

Vapor Outlet: 200 torr

Supply Pressure

DI Water: 10 – 40 psig
N2 Purge: 10 – 40 psig

Ambient Temperature Range

15 – 45°C

Internal Volume

0 to 95% RH, non-condensing

Compliance

EMC

Electromagnetic Compatibility (EMC): Fully Compliant to Directive 2004/108/EC (EN: 61326-1:2013)
Low Voltage Directive (LVD): Fully Compliant to Directive 2006/95/EC (EN: 61010-1:2010)

Environmental Compliance

RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
SEMI E54.20-1108: Standard for Sensor/Actuator Network Communication for EtherCAT®

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