Features
- Integral pressure transducer
- Response time: <1 second
- Wide flow measurement range with full-scale flow rates from 0 – 3 sccm to 0 – 30,000 sccm
- Max pressure 500 psig
- All-metal seal flow path: 32µ inch Ra maximum surface finish
- Co-planar valve offers lower leak-by rates
- Multi-gas/multi-range capability allows for storage and pre-programming of up to 10 gas calibrations and ranges on a single device
- DeviceNet® and analog communication options
Benefits
- Larger co-planar valve control range reduces sensitivity to pressure variations in the process, ensuring a more stable process over time
- All metal wetted flow path to maintain particle, moisture and contamination free process conditions
- Device can also be configured as a mass flow controller for calibration or test purposes
- Multi-gas/multi-range capability reduces inventory
- Greater control range provided by co-planar valve decreases number of parts needed to control the process
- Compact, space saving footprint is easily retrofitable
- Digital communication offers easy commissioning and reduced system wiring
Specifications |
Performance Ratings Mechanical Electrical
| Differentiator | Control Mode: Downstream or Upstream Remote Transducer Wide Flow & Pressure Range |
| Product Type |
Pressure Controller & Flow Meter |
| Flow Range (Full Scale Capacity) |
Any range from 0 to 3 sccm to 0 to 30,000 sccm N2 Eq. |
| Accuracy | ±1% of rate 20-100% F.S. ±0.2% F.S. < 20% F.S. |
| Repeatability | ±0.2% of rate |
| Flow Temperature Coefficient | Zero: Less than 0.035% FS per °C Span: Less than 0.1% of Rate per °C |
| Pressure Range | Dependent upon remote pressure transducer, maximum 500 psig. |
| Pressure Control Range | 20:1 |
| Response Time | < 1 sec typical for a 20-100% setpoint step with max 2% overshoot. Actual pressure response depends on system design. |
| Max Pressure | 500 psig |
| Ambient Temperature Range | Operating: 0°C to 60°C Non-Operating: -25°C to 100°C Fluid: 0°C to 65°C |
| Leak Integrity | Inboard to Outboard 1 x 10-10 atm scc/sec Helium max |
| Seal Material | Metal |
| Power Supply / Consumption | Analog: +15 Vdc, ±5% (traditional -15 Vdc pin is ignored) DeviceNet™: 11 – 25 Vdc |
| Electrical Connection | Analog via 15-Pin “D” Connector DeviceNet™ via 5-Pin “M12” Connector |
| Digital Communication |
DeviceNet™
|
| Analog Communication |
0 – 5 Vdc |
| Diagnostic Capability | Available |
| Valve Options |
Normally Closed |
| Wetted Materials | 316L Vacuum Arc Remelt (VAR) 316L High-Alloy Ferritic Stainless Steel External/Internal Seals: Nickel Valve Seat: 316L Stainless Steel – standard |
| Level of Purity / Surface Finish |
32 µ inch Ra |
