FEATURES
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BENEFITS
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APPLICATIONS
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Specifications |
Performance
Ratings Mechanical Diagnostics Electrical Compliance
| Product Type | Mass Flow Controller |
| Differentiator | Wide Flow & Pressure Range Superior Long-term Stability High Accuracy |
| Flow Range (Full Scale Capacity) | .003 – 2500 slpm |
| Accuracy | Includes uncertainty from reference standards 0.9% of SP (20-100% FS) 0.18% of FS (2-20% FS) 1-50 slpm: 0.18% of SP (1-20% FS) 1100 slpm up to 2500 slpm: 1.0% of FS |
| Repeatability | 0.20% SP |
| Linearity | Included in accuracy |
| Response Time | 0.003 – 100 slpm: <1 second 100 – 2500 slpm: <3 seconds |
| Multi-Gas & Range Configurability | Standard |
| Max Pressure | 273 x 231,50 x 407,75 mm (w x h x d).003-200 slpm: 1500 psi/103 bar 100 – 2500 slpm: 1000 psi/70 bar Optional 4500 psi/310 bar on 50 slpm max device |
| Control Range | 1-50 slpm: 100:1 Turndown for F.S. 50-2500 lpm: 50:1 Turndown for F.S. |
| Zero Stability | < 0.2% F.S. per year |
| Flow Temperature Coefficient | Zero: <0.05% of F.S per oC Span: <0.1% of S.P. per oC |
| Pressure Coefficient | 0.03% per psi (0-200 psi N2) |
| Attitude Sensitivity | <0.2% F.S. maximum deviation from specified accuracy after re-zeroing |
| Max Temperature | 65oC |
| Differential Pressure Range | Controllers .003 – 50 lpm: 5 psi / 0.35 bar 50 – 100 lpm: 10 psi / 0.69 bar 500 lpm: 7.5 psi / 0.52 bar 1000 lpm: 14.5 psi / 1.00 bar 2500 lpm: 35.0 psi / 2.41 bar |
| Leak Integrity | 1×10-9 atm cc/sec He |
| Seal Material | Elastomer Seal |
| Wetted Materials | 316L Stainless Steel High Alloy Stainless Steel Viton® Fluoroelastomers Buna-N Kalrez® Teflon®/Kalrez® EPDM |
| Valve Options | Normally Closed Normally Open Meter (no valve) |
| Diagnostic Capability | Available |
| Status Lights | MFC Health, Network Status |
| Alarms | Sensor Output Control Valve Output Over Temperature Power Surge/Sag Network Interruption |
| Diagnostic / Service Port | RS485 via 2.5mm jack |
| Analog Communication | 0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA |
| Digital Communication | DeviceNet™ EtherCAT® EtherNet/IP™ FOUNDATIONTM Fieldbus Profibus® RS-485 |
| Electrical Connection | DeviceNet™: 1xM12 with threaded coupling nut (B) EtherCAT®, EtherNet/IP™: 1×5-pin M8 with threaded coupling nut/2xRJ45 Profibus®: 1×15-pin Male Sub-D/1×9-pin female Sub-D RS485: 1 x 15-pin Male Sub-D, (A) |
| Power Supply / Consumption | Analog / Profibus® / RS-485 Valve Orifice > 0.032″: 8 Watts Valve Orifice ≤ 0.032″: 5 Watts Without Valve: 2 WattsDeviceNet™ / EtherNet/IP™ Valve Orifice > 0.032″: 10 Watts Valve Orifice ≤ 0.032″: 7 Watts Without Valve: 4 Watts (DeviceNet™), 3 Watts (EtherNet/IP™)EtherCAT® Valve Orifice > 0.032″: 8.5 Watts Valve Orifice ≤ 0.032″: 5.5 Watts Without Valve: 2.5 Watts |
| Certifications/Approvals | ISO/IEC 17025:2005 CE: EMC Directive 2014/30/EU Directive 2011/65/EU UL (Recognized): Class I, Div 2, Group A, B, C, D Class I, Zone 2, IIC T4 Class II, Zone 22 ATEX: II 3 G Ex nA IIC T4 Gc IECEx: II 3 G Ex nA IIC T4 Gc KOSHA: Ex nA IIC T4 |
| Environmental Compliance | RoHS Directive (2011/65/EU) REACH Directive EC 1907/2006 |
| Size | Medium |
