PC100 Series

PC100 Series Metal Sealed Pressure Controllers

Accuracy under pressure. Precision under control.

Models PC115 / PC125

The PC100 Series pressure controllers and meters combine a host of high-performance technology features to deliver a new level of pressure control accuracy and reliability to demanding semiconductor, vapor deposition and other ultra-precise manufacturing processes.

Built on the proven Brooks GF100 mass flow controller technology, the PC100 Series features a high-purity all-metal flow path, enhanced sensor technology engineered specifically to eliminate sensor drift and a user interface and device diagnostics capability that makes it much easier to conduct device evaluation and troubleshooting, resulting in limited service interruption and reduced downtime.

Description

Features
  • Response time: <1 second
  • Full-scale flow rates up to 10 slm
  • Transducer pressure range: 1000 Torr FS
  • All-metal seal flow path: 5µ inch Ra surface finish
  • PC125 with embedded flow meter includes a highly corrosion-resistant Hastelloy® C-22 flow sensor combined with high-speed ARM processor
  • Fast-acting diaphragm-free valve assembly
  • High-visibility LCD display with easily accessible push button for local indication of flow, temperature and network address
  • Independent diagnostic/service port
  • DeviceNet™ protocol
Benefits
  • High-performance components enable fast response and setting time for improved pressure control
  • Reduced diverted gas consumption and associated abatement costs
  • All metal, corrosion resistant SEMI F20 compliant wetted flow path with overall reduced surface area and un-swept volumes ensures faster dry-down during purge steps
  • Long-term thermal or pressure sensor device stability maximizes yield and throughput
  • User-programmable start-up function for processes requiring a slow-ramped pressure control
Applications
  • Semiconductor advanced etch tools
  • Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
  • Physical vapor deposition (PVD) systems
Specifications

Flow Range (Full Scale Capacity)

10 slm (N2 or H2 only)

Performance

Differentiator

Control Mode: Downstream or Upstream
Ultra-High Purity
Digital Pressure Control

Product Type

Pressure Controller

Accuracy

Pressure Reading: ± 1% of reading
Pressure Control: ± 0.2% of F.S. <10% F.S.; ± 1% of reading >10% to 100% F.S.
Flow Reading: ± 0.35% of F.S. 2-35% F.S. ; ± 1% of reading >35% F.S

Repeatability

< ±0.2% F.S.

Flow Temperature Coefficient

Zero: < 0.05% F.S./°C
Span: < 0.08% of reading/°C

Max Pressure

1000 Torr FS

Pressure Control Range

> 2 to 100%

Response Time

< 1 sec typ. (excluding system time constant)

Temperature Range

10 – 50°C

Leak Integrity

External: 1 x 10-10 atm scc/sec He max

Mechanical

Seal Material

Metal

Level of Purity / Surface Finish

5 µ inch Ra

Wetted Materials

SEMI F20 HP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel

Valve Options

Normally Closed

Electrical

Environmental Compliance

RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006

EMC

EC Directive 2014/30/EU
CE: EN61326-1: 2013

Compliance

Power Supply / Consumption

DeviceNet™: 545 mA max @ +11-25 Vdc

Electrical Connection

DeviceNet™ via 5-Pin “M12” Connector

Digital Communication

DeviceNet™

Analog Communication

Diagnostic Capability

Available

You may also like…


    Solicitar información



    Estoy de acuerdo y he leído el aviso legal.

    En cumplimiento de la LOPD 15/1999 de 13 de Diciembre, le informamos que sus datos podrían pasar a formar parte de un fichero propiedad de la empresa Gometrics S.L. Usted tiene derecho de acceso, rectificación, oposición y cancelación que puede ejercer mediante escrito a la dirección anteriormente indicada. Por la presente autoriza expresamente a la compañía a que le remita información sobre sus servicios a la dirección de correo electrónico indicada en el formulario. La información ofrecida en esta página web es meramente orientativa y no es, en ningún caso, vinculante.