GF40 Series

GF40 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

One device. Multiple gases and flows. Maximum flexibility.

Models GF40

Multiple gases in one device equals maximum process flexibility and productivity. The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.

Features

Programmable multi-gas/multi-range capabilities
Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
Sub-1 second flow response time and accuracy of 1% set point for demanding applications
Well suited for a variety of gases
Fast response, Hastelloy sensor
Easily accessible diagnostic service port is independent of tool communication
Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface

Benefits

MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds
OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory
Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards
Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput
User-accessible service port simplifies troubleshooting and diagnostic tasks
Variety of elastomer seals provide cost performance flexibility across range of applications
Multi-protocol communication interface supports integration into existing systems

Applications

Solar cell chemical vapor deposition systems
Life sciences bioreactors
Vacuum processes
Nanotechnology/MEMS fabrication
Plasma, glass and web coating systems

Specifications

Performance Ratings Mechanical Diagnostics Compliance Electrical

Zero Stability	<±0.5% FS per year
Valve Shut Down	Closes valve when set point drops below 1.5% full scale
Number of Bins	10 Bins
Control Range	2-100%
Multi-Gas & Range Configurability	MultiFlo™ Available
Response Time	Normally Closed Valve: 300 ms – <1 sec
Linearity	±0.5% FS (included in accuracy)
Repeatability	0.20% SP
Accuracy	1% of SP 35-100%, 0.35% of FS 2-35%
Flow Range (Full Scale Capacity)	3 sccm – 50 slpm
Differentiator	High Accuracy MultiFlo™ Capability Compact Size Suitable for Full Suite of Gases
Product Type
Pressure Coefficient	0.03% per psi (0-50psi N₂)
Temperature Range	5-50oC (41-122oF)
Max Pressure	150 psig/10 bar
Differential Pressure Range	3-860 sccm = 7-45 psid 861-7200 sccm = 15-45 psid 7201-55000 sccm = 25-45 psid *Contact Brooks Technical Support for more information.
Leak Integrity	1×10-10 atm cc/sec He
Seal Material	Elastomer Seal
Surface Finish	32µ inch Ra
Wetted Materials	316 Stainless Steel, Hastelloy C-22, 1707 PH,43055
Valve Options	Normally Closed Normally Open Meter (no valve)
Diagnostic Capability	Available
Diagnostic / Service Port	Available
Size	Compact
Environmental Compliance	RoHS Directive (2011/65/EU) REACH Directive EC 1907/2006
Certifications/Approvals	CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing) Safety EN61010-1
Power Supply / Consumption	Analog / RS-485 From +12 Vdc to +24 Vdc: 7 Watt/8 WattDeviceNet™ From +11 Vdc to +25 Vdc: 7 Watt/8 WattEtherCAT® / Profibus® From +13.5 Vdc to +27 Vdc: 7 Watt/8 Watt
Electrical Connection	DeviceNet™: 1 x M12 with threaded coupling nut (B) EtherCAT®: 5-pin M8 with threaded coupling nut/2 x RJ45 Profibus®: 1 x 15-pin Male Sub-D/1 x 9-pin female Sub-D RS485: 1 x 15-pin Male Sub-D, (A)
Digital Communication	DeviceNetTM EtherCAT® Profibus® RS485
Analog Communication	0-5 V, 0-10 V 0-20 mA, 4-20 mA

BCN (+34) 93 864 68 43

MAD (+34) 91 864 6843

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