5866RT

5866RT Elastomer Sealed Pressure Controller & Flow Meter

Versatility for high pressure applications across a wide flow measurement range.

Models 5866RT

The Brooks model 5866RT metal or elastomer sealed pressure controller and flow meter controls pressure while also measuring flow rate. Model 5866RT receives a remote pressure transducer signal, and using adjustable integral PID control electronics and control valve, will maintain a desired set pressure. With options in seals, electro-polished wetted surfaces and a wide pressure and flow measurement range, 5866RT delivers proven results across a broad range of processes.

Description

Features
  • Integral pressure transducer
  • Response time: <0.8 seconds
  • Wide flow measurement range with full-scale flow rates from 0 – 3 sccm to 0 – 30,000 sccm
  • Wide range of full scale pressures (Max pressure 1500 psig)
  • Optional metal seal available
  • Electro-polished wetted surfaces (optional)
  • Electrically activated valve override
  • Suitable for upstream or downstream control
  • Analog interface
Benefits
  • Eliminates droop, hysteresis and boost
  • High leak integrity
  • More control over pressure and flow
  • Dynamic tuning adjustments with top mounted DIP switches
Applications
  • Thin-film processes
  • Chemical research
  • Petrochemical research
  • Laboratory
  • Fuel cell
  • Life science
Specifications

Product Type

Pressure Controller & Flow Meter

Temperature Range

0 – 65°C

Max Pressure

1500 psig

Ratings

Response Time

Pressure Response Time:
< 0.8 sec typical for a 0-100% command step with <2% pressure overshoot.
Actual pressure response depends on system design.

Pressure Control Range

100:1 for a remote transducer with a 0-10 V output

Pressure Range

Dependent upon remote pressure transducer

Flow Temperature Coefficient

0.1% F.S. per °C

Repeatability

±0.25% of rate

Accuracy

Flow Accuracy:
±1% F.S. including linearity at the calibration conditions
±1.5% F.S. for flow rates greater than 20 slm

Flow Range (Full Scale Capacity)

Any range 0 to 3 sccm to 0 to 30,000 sccm N2 Eq.

Performance

Differentiator

Remote Transducer
Pressure Control & Flow Measurement

Leak Integrity

Inboard to Outboard
Metal Seal: 1 x 10-10 atm cc/sec He max
Elastomer Seal: 1 x 10-9 atm cc/sec He max

Mechanical

Seal Material

Elastomer or Metal

Wetted Parts: Standard 316L/316L VAR Stainless Steel
Valve Seat: Standard Viton® fluoroelastomers or metal
External/Internal Seals: flouroelastomers or metal
Optional: Buna-N, Teflon® or Kalrez®

Valve Options

Normally Closed
Normally Open
No Valve (elastomer, upstream configuration only)

Electrical

Analog Communication

0-5 V

Digital Communication

Electrical Connection

15-Pin “D” Connector

Size

Compact

EMC

EMC Directive 89/336/EEC EN 61326-1

Certifications/Approvals

Compliance

Diagnostic Capability

Power Supply / Consumption

Normally Closed: 3.5 watts; +15 Vdc (±5%) @ 35 mA, -15 Vdc (±5%) @ 180 mA
Normally Open: 10.5 watts; ±15 Vdc (±5%) @ 350 mA

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