5850E and i Series

5850E & i Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

Long-term device stability keeps your production on-target.

Models 5850E, i / 5860E, i / 5851E, i / 5861E, i / 5853E, i / 5863E, i

Every product line has a workhorse — our 5850E and 5850i Series thermal mass flow controllers fit the bill. Actively in use for decades in thousands of applications worldwide, they utilize a unique, extremely stable flow sensor to provide the reliable, accurate and repeatable measurement and control that today’s demanding industrial manufacturing processes require.


  • Long-term zero stability of <0.2% full scale per year
  • Fast flow response to command changes with negligible overshoot/undershoot
  • Wide range of flow ratings – from 3 sccm up to 1000 slpm
  • High pressure rating – up to 1,500 psi
  • Removable flow sensor
  • Insensitive to mounting attitude
  • Mechanically and electrically compatible with other mass flow controllers
  • Electrically activated valve override
  • Corrosion-resistant valve
  • Proven long-term stability and accuracy across broad process and application range
  • Excellent return on investment due to reliable performance
  • Removable flow sensor eliminates need for continuous monitoring and readjustment of gas pressures
  • Easily installed and serviced due to analog only input/outputs
  • Chemical and petrochemical catalyst research and pilot processes
  • Laboratory and analytical systems
  • Life sciences bioreactors
  • Solar



Proven Reliable Performance
Long Term Stability
Easy to Change Range and Recalibrate in the Field

Product Type

Flow Range (Full Scale Capacity)

0 – 1000 slpm


1% of FS
1.5% of FS > 20 slpm


0.25% of Rate


Included in accuracy

Response Time

E Series Controllers: < 3 seconds
I Series Controllers: < 6 seconds
Meters: 6 Seconds

Multi-Gas & Range Configurability

Max Pressure

Controllers: 1500 psig
Meters: up to 4500 psig on some models

Control Range


Zero Stability

< 0.2% F.S. per year

Flow Temperature Coefficient

Zero: <0.075% of F.S per oC
Span: <1.0% of S.P. over 10-50 oC

Input / Output

0-5 Vdc
I Series: 0-20 mA; 4-20 mA


Max Temperature







Power Supply / Consumption

< 10.5 watts

Electrical Connection

D-type connector

Digital Communication

Analog Communication

0-5 Vdc
0-20 mA
4-20 mA


Diagnostic Capability


Seal Material

Elastomer Seal

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