4800 Series

4800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

Ultra-fast response for time-critical flow processes.

Models 4850 / 4860

The faster your thermal mass flow controllers and meters respond, the more efficient and productive your processes can be. That’s the key advantage of the 4800 Series controllers and meters: An advanced MEMS-based thermal sensor, combined with a proprietary PID algorithm to optimize control valve response, makes it possible for select 4800 Series controllers to quickly match actual mass flow to any changes in set point. The optional Local Operator Interface (LOI) provides a convenient user interface to view, control, and configure the devices eliminating the need for remote secondary electronics.


  • Flow response time (settling time) <0.75 seconds
  • Innovative MEMS sensor and proprietary PID algorithm
  • Compact size is less than half the size of typical thermal MFCs: 1” x 3” x 4” (25 mm x 76 mm x 101 mm)
  • Optional Local Operator Interface (LOI) simplifies set-up and operation; free LabVIEW VI download for monitoring and zeroing the device
  • Digital capability via RS-232
  • Well suited for wide range of common, non-corrosive gases
  • Fast response time ensures rapid steps during process recipe changes
  • Excellent for OEMs: Compact size eases integration into tight machine spaces and speeds installation
  • Optional Local Operator Interface (LOI) is a turnkey solution for local indication, set point control and device configuration; eliminates need for remote secondary electronics
  • Variety of communication options makes it easy to align with user requirements
  • Heat treating, cutting/welding and other thermal processes
  • Solar/thin film physical vapor deposition (PVD) systems
  • Analytical devices to measure and control reagent, calibration and sample gas flows

Product Type


Ultra-fast Response Times
Optional Local Operator Interface
Compact Size
Suitable for Non-corrosive Gases


Flow Temperature Coefficient

Control Range


Multi-Gas & Range Configurability

Response Time

Normally Closed Valve: 300 ms – <1 sec


0.15% FS


3.0% of FS
1.0% of FS (optional)

Gases Supported

Flow Range (Full Scale Capacity)

50 sccm – 40 slpm


Temperature Range

5-50oC (41-122oF)

Max Pressure

150 psig/10 barg

Differential Pressure Range

3-860 sccm = 7-45 psid
861-7200 sccm = 15-45 psid
7201-55000 sccm = 25-45 psid
*Contact Brooks Technical Support for more information.

Leak Integrity

1×10-10 atm cc/sec He


Seal Material

Elastomer Seal

Wetted Materials

316 Stainless Steel, Hastelloy C-22, 1707 PH,43055

Diagnostics & Display

Diagnostic Capability



Analog Communication

0-5 Vdc
4-20 mA

Digital Communication




Environmental Compliance

RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006


ATEX Zone 2
CSA Div 2/Zone 2 (Recognized)


EMC Directive 2004/108/EC: per EN 61326:2006


Power Requirements

The LOI optionally includes a wall mount power adaptor with a 3.5-mm DC-plug. The adaptor works with input voltages of AC 90-240 V/47-63Hz. The adaptor supports European, U.K., Australia and U.S. wall plugs. Power can also be supplied by a remote connection via the D-connector.

Power Adaptor

P/N: 641Z059AAA

Electrical Connection

wo 15-pin D-sub connectors

  • One for connection to the 4800 Series
  • One for the remote connection


5 – 95% RH (ambient)

Max Temperature


Display Area

28mm wide x 11mm high

Local Operator Interface

P/N: 273L156ZZZ

Optional Equipment

Power Supply / Consumption


Electrical Connection


Input / Output

0-5 Vdc, 4-20 mA, RS-232 (Standard with all analog I/O options)

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